Accurate surface profile measurement using CMM without estimating tip correction vectors

IF 3.5 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2024-09-11 DOI:10.1016/j.precisioneng.2024.09.009

M. Watanabe, O. Sato, K. Matsuzaki, M. Kajima, T. Watanabe, Y. Bitou, T. Takatsuji

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引用次数: 0

Abstract

Detailed measurement of the curved surface of an industrial product with a radius of curvature of less than a few millimeters is a challenging task for tactile coordinate measuring machines. To estimate a surface profile, tip radius correction is typically performed by estimating the tip correction vector direction. However, a substantial measurement error is introduced by the error in estimating the tip correction vector direction under measurement conditions such as a large position measurement error of an indicated measured point or a short sampling interval, In this study, a method that can estimate a surface profile by calculating the envelope of a probe tip path was proposed. The proposed method was experimentally and numerically confirmed to be able to estimate surface profiles with sub-micrometer accuracy under such measurement conditions.

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使用坐标测量机精确测量表面轮廓，无需估计针尖修正矢量

对于触觉坐标测量机来说，详细测量曲率半径小于几毫米的工业产品曲面是一项具有挑战性的任务。为了估算表面轮廓，通常通过估算针尖修正矢量方向来进行针尖半径修正。然而，在指示测量点位置测量误差较大或采样间隔较短等测量条件下，估计测尖修正矢量方向的误差会带来很大的测量误差。实验和数值结果证实，在这种测量条件下，所提出的方法能够以亚微米级的精度估算表面轮廓。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology 工程技术-工程：制造

CiteScore

7.40

自引率

5.60%

发文量

177

审稿时长

46 days

期刊介绍： Precision Engineering - Journal of the International Societies for Precision Engineering and Nanotechnology is devoted to the multidisciplinary study and practice of high accuracy engineering, metrology, and manufacturing. The journal takes an integrated approach to all subjects related to research, design, manufacture, performance validation, and application of high precision machines, instruments, and components, including fundamental and applied research and development in manufacturing processes, fabrication technology, and advanced measurement science. The scope includes precision-engineered systems and supporting metrology over the full range of length scales, from atom-based nanotechnology and advanced lithographic technology to large-scale systems, including optical and radio telescopes and macrometrology.