Flexible Superconducting Wiring for Integration with Low-Temperature Detector and Readout Fabrication

Abstract

We present a method of creating high-density superconducting flexible wiring on flexible thin silicon substrates. The flexible wiring, called SOI flex, is created by depositing superconducting wiring on a silicon-on-insulator (SOI) wafer, selectively etching away the thicker silicon section handle layer, and bending the thinner silicon device layer. We show measurements of superconducting transition temperature and critical current for Mo, Nb, and Al on SOI flex. We discuss the expected advantages of SOI flex for low-temperature detector applications, as well as the role of stress and strain in bent silicon and niobium.