A unified global model accompanied with a voltage and current sensor for low-pressure capacitively coupled RF discharge

Abstract

A global model (GM) assumes ion energy ( ) on the electrode equals the time-averaged sheath voltage ( ). However, using particle-in-cell simulation, we found that differs from We propose a unified global model (UGM) that calculates and collisional energy losses of ions by employing plasma circuit and sheath models, accompanied by a voltage and current sensor. We compared the results of the UGM with the experimental measurements and the results revealed that UGM is closer to the experiment than GM. UGM shows a linear relationship with the experiment, indicating that the UGM is applicable for plasma monitoring.