Capacitive Micromachined Transducers With Out-of-Plane Repulsive Actuation for Enhancing Ultrasound Transmission in Air

IF 2.5 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Journal of Microelectromechanical Systems Pub Date : 2024-09-18 DOI:10.1109/jmems.2024.3455095

Roufaida Bensalem, Mohannad Y. Elsayed, Hani H. Tawfik, Mourad N. El-Gamal

引用次数: 0

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具有平面外斥动力的电容式微机械传感器，用于增强空气中的超声波传输

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Journal of Microelectromechanical Systems 工程技术-工程：电子与电气

CiteScore

6.20

自引率

7.40%

发文量

115

审稿时长

7.5 months

期刊介绍： The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.