Diffractive microoptics in porous silicon oxide by grayscale lithography

IF 3.2 2区 物理与天体物理 Q2 OPTICS
Optics express Pub Date : 2024-09-18 DOI:10.1364/oe.538142
Leander Siegle, Dajie Xie, Corey A. Richards, Paul V. Braun, Harald Giessen
{"title":"Diffractive microoptics in porous silicon oxide by grayscale lithography","authors":"Leander Siegle, Dajie Xie, Corey A. Richards, Paul V. Braun, Harald Giessen","doi":"10.1364/oe.538142","DOIUrl":null,"url":null,"abstract":"We demonstrate focusing as well as imaging using diffractive microoptics, manufactured by two-photon polymerization grayscale lithography (2GL), that have been 3D printed into porous silicon oxide. While typical doublet lens systems require support structures that hold the lenses in place, our optics are held by the porous media itself, decreasing both the fabrication time and design constraints while increasing the optically active area. Compared to the typical two-photon polymerization fabrication process, 2GL offers better shape accuracy while simultaneously increasing throughput. To showcase 2GL manufactured optics in porous media, we fabricate singlet diffractive lenses with a diameter of 500 µm and numerical apertures of up to 0.6. We measure the intensity distribution in the focal plane, and along the optical axis. Furthermore, we design and fabricate a doublet lens system for imaging purposes with a diameter of 600 µm and thinner than 60 µm. We examine the imaging performance with a USAF 1951 resolution test chart and determine the resolution to be 287 lp/mm. 3D printing in porous SiO<jats:sub>2</jats:sub> thus holds great promise for future complex and unconventional microoptical solutions.","PeriodicalId":19691,"journal":{"name":"Optics express","volume":"5 1","pages":""},"PeriodicalIF":3.2000,"publicationDate":"2024-09-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optics express","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1364/oe.538142","RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"OPTICS","Score":null,"Total":0}
引用次数: 0

Abstract

We demonstrate focusing as well as imaging using diffractive microoptics, manufactured by two-photon polymerization grayscale lithography (2GL), that have been 3D printed into porous silicon oxide. While typical doublet lens systems require support structures that hold the lenses in place, our optics are held by the porous media itself, decreasing both the fabrication time and design constraints while increasing the optically active area. Compared to the typical two-photon polymerization fabrication process, 2GL offers better shape accuracy while simultaneously increasing throughput. To showcase 2GL manufactured optics in porous media, we fabricate singlet diffractive lenses with a diameter of 500 µm and numerical apertures of up to 0.6. We measure the intensity distribution in the focal plane, and along the optical axis. Furthermore, we design and fabricate a doublet lens system for imaging purposes with a diameter of 600 µm and thinner than 60 µm. We examine the imaging performance with a USAF 1951 resolution test chart and determine the resolution to be 287 lp/mm. 3D printing in porous SiO2 thus holds great promise for future complex and unconventional microoptical solutions.
利用灰度光刻技术在多孔氧化硅中实现衍射微光学
我们展示了通过双光子聚合灰度光刻技术(2GL)制造的衍射微光学器件的聚焦和成像效果,这些器件是用三维打印技术打印到多孔氧化硅中的。典型的双透镜系统需要支撑结构将透镜固定到位,而我们的光学器件是由多孔介质本身固定的,从而减少了制造时间和设计限制,同时增加了光学有效面积。与典型的双光子聚合制造工艺相比,2GL 能提供更好的形状精度,同时提高产量。为了展示 2GL 在多孔介质中制造的光学器件,我们制造了直径为 500 微米、数值孔径高达 0.6 的单子衍射透镜。我们测量了焦平面和沿光轴的强度分布。此外,我们还设计并制造了一个用于成像的双透镜系统,其直径为 600 微米,厚度小于 60 微米。我们用美国空军 1951 分辨率测试图检验了成像性能,确定分辨率为 287 lp/mm。因此,多孔二氧化硅三维打印技术在未来复杂和非常规的微光学解决方案中大有可为。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 求助全文
来源期刊
Optics express
Optics express 物理-光学
CiteScore
6.60
自引率
15.80%
发文量
5182
审稿时长
2.1 months
期刊介绍: Optics Express is the all-electronic, open access journal for optics providing rapid publication for peer-reviewed articles that emphasize scientific and technology innovations in all aspects of optics and photonics.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信