Thick piezoelectric films by aerosol deposition at room temperature: corona poling and force sensing

IF 1.5 4区 物理与天体物理 Q3 PHYSICS, APPLIED
Kohei Maruyama, Yoshihiro Kawakami and Fumio Narita
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引用次数: 0

Abstract

In this study, we employed corona poling to improve the piezoelectric properties of as-deposited BaTiO3 films and conducted a vibration energy harvesting test. Dielectric measurements indicated that the dielectric constant of the as-deposited film increased with temperature, and the frequency dependence of the dielectric constant was minimal at room temperature. Applying an electric field of 1500 kV cm−1 resulted in a recoverable energy density of 7.1 J cm−3 and an energy storage efficiency of 54%. The corona polarization treatment could align dipoles under high electric fields and prevent dielectric breakdown owing to local defects created by the aerosol deposition (AD) process. The vibration test yielded a harvested energy of 172 nJ and an output voltage of 2.67 V, which is suitable for force sensor applications. Polarization via corona discharge is also feasible without an electrode. Integrating AD with corona poling may benefit new capacitors, sensors, and energy harvesting technologies.
在室温下通过气溶胶沉积实现厚压电薄膜:电晕极化和力传感
在这项研究中,我们采用电晕极化来改善铟镓硒薄膜的压电特性,并进行了振动能量收集试验。介电测量结果表明,铟镓硒薄膜的介电常数随温度升高而增加,在室温下介电常数的频率依赖性很小。施加 1500 kV cm-1 的电场后,可回收能量密度为 7.1 J cm-3,储能效率为 54%。电晕极化处理可使偶极子在高电场下排列整齐,并防止因气溶胶沉积(AD)过程产生的局部缺陷而导致介电击穿。振动测试产生的能量为 172 nJ,输出电压为 2.67 V,适用于力传感器应用。在没有电极的情况下,通过电晕放电进行极化也是可行的。将 AD 与电晕极化技术相结合,可能有益于新型电容器、传感器和能量采集技术。
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来源期刊
Japanese Journal of Applied Physics
Japanese Journal of Applied Physics 物理-物理:应用
CiteScore
3.00
自引率
26.70%
发文量
818
审稿时长
3.5 months
期刊介绍: The Japanese Journal of Applied Physics (JJAP) is an international journal for the advancement and dissemination of knowledge in all fields of applied physics. JJAP is a sister journal of the Applied Physics Express (APEX) and is published by IOP Publishing Ltd on behalf of the Japan Society of Applied Physics (JSAP). JJAP publishes articles that significantly contribute to the advancements in the applications of physical principles as well as in the understanding of physics in view of particular applications in mind. Subjects covered by JJAP include the following fields: • Semiconductors, dielectrics, and organic materials • Photonics, quantum electronics, optics, and spectroscopy • Spintronics, superconductivity, and strongly correlated materials • Device physics including quantum information processing • Physics-based circuits and systems • Nanoscale science and technology • Crystal growth, surfaces, interfaces, thin films, and bulk materials • Plasmas, applied atomic and molecular physics, and applied nuclear physics • Device processing, fabrication and measurement technologies, and instrumentation • Cross-disciplinary areas such as bioelectronics/photonics, biosensing, environmental/energy technologies, and MEMS
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