{"title":"Flexible strain gauges that can be picked and placed","authors":"Matthew Parker","doi":"10.1038/s41928-024-01253-6","DOIUrl":null,"url":null,"abstract":"<p>Each sensor consists of multiple micro-strain gauges containing a stressed layer of silicon dioxide that, after the stress is released by dissolving a sacrificial layer, deforms into a three-dimensional geometry. Thin metal or alloy wires on the strain gauges can measure normal force, shear force and temperature. Because the sensors are made by standard processes used in microelectromechanical system fabrication, the researchers — who are based at Peking University, North China University of Technology, the Chinese Academy of Medical Sciences, and Peking University Third Hospital — can manufacture them in large arrays on a four-inch silicon wafer. These can then be separately detached and placed on different substrates, such as a flexible printed circuit board, to achieve the desired sensor distribution and density.</p><p><b>Original reference:</b> <i>Sci. Adv</i>. <b>10</b>, eadp6094 (2024)</p>","PeriodicalId":19064,"journal":{"name":"Nature Electronics","volume":null,"pages":null},"PeriodicalIF":33.7000,"publicationDate":"2024-09-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nature Electronics","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1038/s41928-024-01253-6","RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
Abstract
Each sensor consists of multiple micro-strain gauges containing a stressed layer of silicon dioxide that, after the stress is released by dissolving a sacrificial layer, deforms into a three-dimensional geometry. Thin metal or alloy wires on the strain gauges can measure normal force, shear force and temperature. Because the sensors are made by standard processes used in microelectromechanical system fabrication, the researchers — who are based at Peking University, North China University of Technology, the Chinese Academy of Medical Sciences, and Peking University Third Hospital — can manufacture them in large arrays on a four-inch silicon wafer. These can then be separately detached and placed on different substrates, such as a flexible printed circuit board, to achieve the desired sensor distribution and density.
期刊介绍：
Nature Electronics is a comprehensive journal that publishes both fundamental and applied research in the field of electronics. It encompasses a wide range of topics, including the study of new phenomena and devices, the design and construction of electronic circuits, and the practical applications of electronics. In addition, the journal explores the commercial and industrial aspects of electronics research.
The primary focus of Nature Electronics is on the development of technology and its potential impact on society. The journal incorporates the contributions of scientists, engineers, and industry professionals, offering a platform for their research findings. Moreover, Nature Electronics provides insightful commentary, thorough reviews, and analysis of the key issues that shape the field, as well as the technologies that are reshaping society.
Like all journals within the prestigious Nature brand, Nature Electronics upholds the highest standards of quality. It maintains a dedicated team of professional editors and follows a fair and rigorous peer-review process. The journal also ensures impeccable copy-editing and production, enabling swift publication. Additionally, Nature Electronics prides itself on its editorial independence, ensuring unbiased and impartial reporting.
In summary, Nature Electronics is a leading journal that publishes cutting-edge research in electronics. With its multidisciplinary approach and commitment to excellence, the journal serves as a valuable resource for scientists, engineers, and industry professionals seeking to stay at the forefront of advancements in the field.
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