Influence of Sodium Chloride and Potassium Fluoride on Electrochemical Properties of Aluminum Copper Interdigital Structures

IF 3.1 4区 工程技术 Q2 ELECTROCHEMISTRY
D. Nienhues, L. Müller and M. Nowottnick
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引用次数: 0

Abstract

This paper evaluates the electrochemical properties of aluminum (0.5 w%) copper alloy metallized test chip surfaces with interdigital structures and distances between 3 and 20 μm, regarding sodium chloride and potassium fluoride contamination in the range of 1011–1016 ions per cm2 at high humidity (85%) and high temperature (85 °C). These accelerated tests result in leakage currents and impedance values which show a significant change above a contamination limit value of 1014 ions per cm2 for both salts i.e., the leakage current starts to increase well above a few pico amperes, and the impedance decreases significantly. This contamination level can be seen as a turning point, after which devices can undergo for example signal shifts or corroded metal tracks over lifetime. But not only the start point of an increase in leakage current decides about the harmfulness of the contamination, other important influences are deliquescence and how high the leakage current gets at its maximum. Therefore, even with the same starting point, the risk evaluation is not the same for sodium chloride and potassium fluoride.
氯化钠和氟化钾对铝铜互层结构电化学性质的影响
本文评估了在高湿度(85%)和高温(85 °C)条件下,铝(0.5 w%)铜合金金属化测试芯片表面的电化学特性,测试芯片表面具有间隙结构,间距在 3 至 20 μm 之间,氯化钠和氟化钾的污染范围为每平方厘米 1011 至 1016 个离子。这些加速测试结果表明,当两种盐的污染极限值超过每平方厘米 1014 个离子时,漏电流和阻抗值都会发生显著变化,即漏电流开始增加,远远超过几个皮安,阻抗也会明显下降。这一污染水平可被视为一个转折点,此后,器件在整个使用寿命期间会出现信号偏移或金属轨道腐蚀等问题。但决定污染有害性的不仅是泄漏电流增加的起点,其他重要影响因素还包括潮解和泄漏电流达到最大值时的高度。因此,即使起点相同,氯化钠和氟化钾的风险评估也不尽相同。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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来源期刊
CiteScore
7.20
自引率
12.80%
发文量
1369
审稿时长
1.5 months
期刊介绍: The Journal of The Electrochemical Society (JES) is the leader in the field of solid-state and electrochemical science and technology. This peer-reviewed journal publishes an average of 450 pages of 70 articles each month. Articles are posted online, with a monthly paper edition following electronic publication. The ECS membership benefits package includes access to the electronic edition of this journal.
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