Parametric Amplification in Depletion Layer Transduced Microelectromechanical Resonator

IF 2.5 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Journal of Microelectromechanical Systems Pub Date : 2024-08-30 DOI:10.1109/JMEMS.2024.3447694

Satish K. Verma;Bhaskar Mitra

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引用次数: 0

Abstract

This paper introduces a method for signal amplification and enhancement of full width half maxima (FWHM) in a depletion layer-transduced flexural resonator using the parametric effect. The device can be used as a filter-amplifier, or as a low-noise readout method for sensors. Parametric excitation shows a significant drop in device impedance, from 334.2 k

$\Omega $

without a pump signal to 45.9 k

$\Omega $

with a 300 mV pump signal. In the absence of the pump signal, with an input power of −10 dBm, the resonator produces an output power of −44.87 dBm at ~400 kHz and a FWHM value of 23 Hz. However, when a 200 mV pump signal at

$2f_{0}$

with

$\pi $

/2 phase shift, is superimposed with the same input power, the resonator’s output power amplifies to −11.49 dBm, and the FWHM value substantially decreases to 10 Hz. This leads to a 33.58 dBm of amplification and 2.3x improvement in Q attributed to the parametric effect. A detailed analytical model of the transducer is presented. [2024-0061]

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来源期刊

Journal of Microelectromechanical Systems 工程技术-工程：电子与电气

CiteScore

6.20

自引率

7.40%

发文量

115

审稿时长

7.5 months

期刊介绍： The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.