Hydrogen gas sensor based on NiO decorated macroporous silicon heterojunction

IF 1.9 4区材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY

Bulletin of Materials Science Pub Date : 2024-08-22 DOI:10.1007/s12034-024-03305-1

K M’hammedi, L Talbi, M Berouaken, A Manseri, N Gabouze

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Abstract

A highly sensitive hydrogen gas sensor operating at room temperature made of macroporous silicon (MPS) coated with a thin NiO film was developed. MPS layer was shaped by electrochemical anodization on an n-type Si surface. Thereafter, p-type NiO film was deposited onto the MPS surface by electrodeposition method. The morphology of the NiO/MPS sample was characterized by scanning electron microscopy. Al electrical contacts for further measurements were deposited onto the structure NiO/MPS by evaporation technique under vacuum. Gas sensing performances were measured to various H₂ concentrations ranging from 122 to 1342 ppm at room temperature. The results showed that the electrical behaviour of synthesized NiO/MPS sensor is similar to that of a diode, which can be used to detect H₂ gas at low concentrations, which reveals high sensitivity, fast response and recovery times working at room temperature.

Graphical Abstract

Abstract Image

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基于氧化镍装饰大孔硅异质结的氢气传感器

本研究开发了一种可在室温下工作的高灵敏度氢气传感器，该传感器由涂有氧化镍薄膜的大孔硅 (MPS) 制成。MPS 层是在 n 型硅表面上通过电化学阳极化形成的。随后，通过电沉积法在 MPS 表面沉积了 p 型氧化镍薄膜。通过扫描电子显微镜对 NiO/MPS 样品的形态进行了表征。在真空条件下，通过蒸发技术将用于进一步测量的铝电触点沉积到 NiO/MPS 结构上。在室温下测量了 122 至 1342 ppm 不同浓度的 H2 的气体传感性能。结果表明，合成的 NiO/MPS 传感器的电特性类似于二极管，可用于检测低浓度的 H2 气体，在室温下工作时灵敏度高、响应速度快、恢复时间短。

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来源期刊

Bulletin of Materials Science 工程技术-材料科学：综合

CiteScore

3.40

自引率

5.60%

发文量

209

审稿时长

11.5 months

期刊介绍： The Bulletin of Materials Science is a bi-monthly journal being published by the Indian Academy of Sciences in collaboration with the Materials Research Society of India and the Indian National Science Academy. The journal publishes original research articles, review articles and rapid communications in all areas of materials science. The journal also publishes from time to time important Conference Symposia/ Proceedings which are of interest to materials scientists. It has an International Advisory Editorial Board and an Editorial Committee. The Bulletin accords high importance to the quality of articles published and to keep at a minimum the processing time of papers submitted for publication.