Atomic and Molecular Layer Deposition of Functional Thin Films Based on Rare Earth Elements

IF 4.3 3区材料科学 Q2 CHEMISTRY, MULTIDISCIPLINARY

Advanced Materials Interfaces Pub Date : 2024-08-23 DOI:10.1002/admi.202400274

Amr Ghazy, David Zanders, Anjana Devi, Maarit Karppinen

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引用次数: 0

Abstract

High‐quality rare earth element (R) based thin films are in demand for applications ranging from (opto)electronics and energy conversion/storage to medical diagnostics, imaging and security technologies. Atomic layer deposition (ALD) offers large‐area homogeneous and conformal ultrathin films and is uniquely suited to address the requirements set by the potential applications of R‐based thin films. The history starts from the 1990s, when the first electroluminescent R‐doped thin films were grown with ALD. The interest soon expanded to rare earth element oxide layers as high‐k gate dielectrics in semiconductor devices, and later to complex ternary and quaternary perovskite oxides with novel functional properties. The most recent advancements related to the combined atomic/molecular layer deposition (ALD/MLD) have rapidly expanded the family of R‐organic hybrid materials with intriguing luminescence and up‐conversion properties. This review provides up‐to‐date insights to the current state of ALD and ALD/MLD research of R‐based thin films and highlights their application potential.

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基于稀土元素的原子和分子层沉积功能薄膜

从（光）电子学、能量转换/存储到医疗诊断、成像和安全技术，各种应用领域都需要高质量的稀土元素 (R) 薄膜。原子层沉积 (ALD) 可提供大面积均匀、保形的超薄薄膜，是满足稀土元素薄膜潜在应用要求的独特选择。其历史始于 20 世纪 90 年代，当时利用 ALD 制备了第一批掺杂 R 的电致发光薄膜。很快，人们的兴趣扩展到将稀土元素氧化物层作为半导体器件中的高 K 栅极电介质，后来又扩展到具有新型功能特性的复杂三元和四元包晶氧化物。与原子/分子层沉积（ALD/MLD）相结合的最新进展迅速扩大了具有迷人发光和上转换特性的 R 有机杂化材料家族。本综述将介绍 R 基薄膜的 ALD 和 ALD/MLD 研究的最新进展，并重点介绍其应用潜力。

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来源期刊

Advanced Materials Interfaces CHEMISTRY, MULTIDISCIPLINARY-MATERIALS SCIENCE, MULTIDISCIPLINARY

CiteScore

8.40

自引率

5.60%

发文量

1174

审稿时长

1.3 months

期刊介绍： Advanced Materials Interfaces publishes top-level research on interface technologies and effects. Considering any interface formed between solids, liquids, and gases, the journal ensures an interdisciplinary blend of physics, chemistry, materials science, and life sciences. Advanced Materials Interfaces was launched in 2014 and received an Impact Factor of 4.834 in 2018. The scope of Advanced Materials Interfaces is dedicated to interfaces and surfaces that play an essential role in virtually all materials and devices. Physics, chemistry, materials science and life sciences blend to encourage new, cross-pollinating ideas, which will drive forward our understanding of the processes at the interface. Advanced Materials Interfaces covers all topics in interface-related research: Oil / water separation, Applications of nanostructured materials, 2D materials and heterostructures, Surfaces and interfaces in organic electronic devices, Catalysis and membranes, Self-assembly and nanopatterned surfaces, Composite and coating materials, Biointerfaces for technical and medical applications. Advanced Materials Interfaces provides a forum for topics on surface and interface science with a wide choice of formats: Reviews, Full Papers, and Communications, as well as Progress Reports and Research News.