3D Printed Miniaturized Magnetic Actuator for Micro-Area Temperature Sensing

Abstract

Actuators containing sensors are developed for various applications. However, it is still challenging to equip miniaturized high-precision sensors with actuators at the micrometer scale to achieve micro-environment detection. Here, a two-in-one processing strategy to construct a sensor-equipped magnetic actuator (SEMA) is proposed. The design of magnetic actuators is continuously optimized to achieve less resistance and faster acceleration. Besides, the temperature-dependent properties of semiconductor quantum dots (QDs) are used to fabricate the temperature-sensitive unit (TSU), with a sensitivity of up to 111 pm °C⁻¹. Finally, as a proof of concept, the real-time temperature detection of arbitrary micro-area in microchannels is achieved. This method of equipping sensors with microactuators will bring many potential applications in microenvironment sensing, micro-mechanical manipulating, and microcargo transporting.