{"title":"Research on performance of porous scaffold-based getter activated by induction heating and its application in MEMS device","authors":"","doi":"10.1016/j.vacuum.2024.113626","DOIUrl":null,"url":null,"abstract":"<div><p>Non-evaporable getter (NEG) is widely used in vacuum packaging. However, there are two main contradictions. Firstly, the contradiction between bonding temperature of the device and activation temperature of the getter results in the getter being activated first and then packaged, and cannot be repeatedly activated, which seriously reduces the adsorption capacity and life of the getter. Secondly, the contradiction between the small package volume and the large adsorption capacity, how to integrate large adsorption capacity getter in a small space is a tricky problem. In view of the above contradictions, a porous scaffold-based getter activated by induction heating was proposed in this paper, results show that when nickel plating is used as the induction heating layer, the temperature can quickly rise to 700 °C within 10 s, and 1 μm Ti getter can be fully activated for 7 min. The good periodicity of the temperature curves proved that the nickel layer has good repeatable heating characteristics. In addition, the adsorption performance of the getter was tested and characterized at device level. The device level characterization of optical deflection method proves the effectiveness of induction heating to activate getter, which lays a foundation for the application of getter on MEMS devices.</p></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":null,"pages":null},"PeriodicalIF":3.8000,"publicationDate":"2024-09-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Vacuum","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0042207X24006729","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0
Abstract
Non-evaporable getter (NEG) is widely used in vacuum packaging. However, there are two main contradictions. Firstly, the contradiction between bonding temperature of the device and activation temperature of the getter results in the getter being activated first and then packaged, and cannot be repeatedly activated, which seriously reduces the adsorption capacity and life of the getter. Secondly, the contradiction between the small package volume and the large adsorption capacity, how to integrate large adsorption capacity getter in a small space is a tricky problem. In view of the above contradictions, a porous scaffold-based getter activated by induction heating was proposed in this paper, results show that when nickel plating is used as the induction heating layer, the temperature can quickly rise to 700 °C within 10 s, and 1 μm Ti getter can be fully activated for 7 min. The good periodicity of the temperature curves proved that the nickel layer has good repeatable heating characteristics. In addition, the adsorption performance of the getter was tested and characterized at device level. The device level characterization of optical deflection method proves the effectiveness of induction heating to activate getter, which lays a foundation for the application of getter on MEMS devices.
非蒸发获取器(NEG)被广泛应用于真空包装。然而,其中存在两个主要矛盾。一是装置的粘合温度与吸附剂活化温度之间的矛盾,导致吸附剂先活化后包装,不能反复活化,严重降低了吸附剂的吸附能力和使用寿命。其次,小包装体积与大吸附容量之间的矛盾,如何在小空间内集成大吸附容量的getter是一个棘手的问题。针对上述矛盾,本文提出了一种基于多孔支架的感应加热活化俘获器,结果表明,当采用镀镍作为感应加热层时,温度可在 10 s 内迅速升至 700 ℃,1 μm Ti 俘获器可在 7 min 内被完全活化。温度曲线的良好周期性证明镍层具有良好的可重复加热特性。此外,还在器件级测试和表征了掺镍层的吸附性能。光学偏转法的器件级表征证明了感应加热对激活getter的有效性,这为getter在微机电系统器件上的应用奠定了基础。
期刊介绍:
Vacuum is an international rapid publications journal with a focus on short communication. All papers are peer-reviewed, with the review process for short communication geared towards very fast turnaround times. The journal also published full research papers, thematic issues and selected papers from leading conferences.
A report in Vacuum should represent a major advance in an area that involves a controlled environment at pressures of one atmosphere or below.
The scope of the journal includes:
1. Vacuum; original developments in vacuum pumping and instrumentation, vacuum measurement, vacuum gas dynamics, gas-surface interactions, surface treatment for UHV applications and low outgassing, vacuum melting, sintering, and vacuum metrology. Technology and solutions for large-scale facilities (e.g., particle accelerators and fusion devices). New instrumentation ( e.g., detectors and electron microscopes).
2. Plasma science; advances in PVD, CVD, plasma-assisted CVD, ion sources, deposition processes and analysis.
3. Surface science; surface engineering, surface chemistry, surface analysis, crystal growth, ion-surface interactions and etching, nanometer-scale processing, surface modification.
4. Materials science; novel functional or structural materials. Metals, ceramics, and polymers. Experiments, simulations, and modelling for understanding structure-property relationships. Thin films and coatings. Nanostructures and ion implantation.