A general and accurate pattern search method for various scenarios

IF 2.2 3区工程技术 Q3 COMPUTER SCIENCE, HARDWARE & ARCHITECTURE

Integration-The Vlsi Journal Pub Date : 2024-09-11 DOI:10.1016/j.vlsi.2024.102281

Congyi Zhang , Xu He , Hao Sang , Hengzhou Yuan , Dawei Liu , Yang Guo

引用次数: 0

Abstract

As chip designs grow in complexity, the optical proximity correction (OPC) process becomes increasingly time-consuming. As a result, pattern search technology is becoming a foundation stone of many tasks for manufacturing, such as lithography simulation, hotspot detection, mask optimization, and so on. The most difficult challenge of pattern search is to locate clips by specific patterns within the layout accurately and efficiently. In this paper, we present a generalized pattern search method capable in diverse scenarios, including patterns with hollow shapes, shifting edges, and multi-layer situations. Experimental results show that our method outperforms commercial tools in pattern locating accuracy and handling search problems involving complex patterns which is not directly support by commercial tools yet.

查看原文本刊更多论文

适用于各种情况的通用精确模式搜索法

随着芯片设计日趋复杂，光学接近校正（OPC）过程变得越来越耗时。因此，图案搜索技术正成为光刻模拟、热点检测、光罩优化等许多制造任务的基石。图案搜索最困难的挑战是如何准确、高效地在版图中通过特定图案定位剪辑。在本文中，我们提出了一种通用的图案搜索方法，该方法可适用于多种场景，包括具有空心形状、边缘移动和多层情况的图案。实验结果表明，我们的方法在图案定位精度和处理复杂图案搜索问题方面优于商业工具，而商业工具尚不能直接支持复杂图案的搜索。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

求助全文

约1分钟内获得全文求助全文

来源期刊

Integration-The Vlsi Journal 工程技术-工程：电子与电气

CiteScore

3.80

自引率

5.30%

发文量

107

审稿时长

6 months

期刊介绍： Integration''s aim is to cover every aspect of the VLSI area, with an emphasis on cross-fertilization between various fields of science, and the design, verification, test and applications of integrated circuits and systems, as well as closely related topics in process and device technologies. Individual issues will feature peer-reviewed tutorials and articles as well as reviews of recent publications. The intended coverage of the journal can be assessed by examining the following (non-exclusive) list of topics: Specification methods and languages; Analog/Digital Integrated Circuits and Systems; VLSI architectures; Algorithms, methods and tools for modeling, simulation, synthesis and verification of integrated circuits and systems of any complexity; Embedded systems; High-level synthesis for VLSI systems; Logic synthesis and finite automata; Testing, design-for-test and test generation algorithms; Physical design; Formal verification; Algorithms implemented in VLSI systems; Systems engineering; Heterogeneous systems.