AlScN-based quasi-static multi-degree-of-freedom piezoelectric MEMS micromirror with large mirror plate and high fill factor

IF 4.1 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical Pub Date : 2024-09-11 DOI:10.1016/j.sna.2024.115868

Junning Zhang , Yan Wang , Peng Chen , Tunan Lv , Hongbin Yu

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Abstract

A quasi-static multi-degree-of-freedom piezoelectric MEMS micromirror with large mirror plate and high fill factor based on AlScN is presented. It consists of two individual components, namely the mirror plate and the actuator. They are fabricated separately and vertically assembled together to form the final combination. In current case, a square mirror plate with side length of 5 mm is used. The actuator is designed into a gimbal-less structure, which involves a central connection platform with a mounting hole and four groups of piezoelectric actuators that are connected to the platform's corners via serpentine springs. This configuration provides multi-degree-of-freedom driving capabilities, allowing tip-tilt-piston mirror movement. The piezoelectric actuator is composed of three-stage cantilever-type actuation units that are connected in series, and they are intentionally arranged into S-shape so as to be completely hidden beneath the mirror plate. Moreover, the driving performance is further improved by optimizing the electrode coverage region on each actuation unit. As a result, not only large displacement but also nearly 100 % fill factor as well as high optical utilization efficiency can be achieved. From experimental results, the as-fabricated MEMS micromirror demonstrates static mechanical tilt angles of approximately ±2.2° about two orthogonal axes and piston vertical movement of ±54.9 μm within ±50 V_DC driving voltage range with excellent linearity. Given the large mirror size, high fill factor and multi-degree-of-freedom motion advantages, the proposed micromirror could be found application perspective in light field shaping, free space optical communication and projection lithography areas.

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基于 AlScN 的准静态多自由度压电 MEMS 微镜，具有大镜面板和高填充因子

本文介绍了一种基于 AlScN 的准静态多自由度压电 MEMS 微镜，它具有大镜板和高填充因子。它由两个独立的部件组成，即镜板和致动器。它们分别制造并垂直组装在一起，形成最终组合。本例中使用的是边长为 5 毫米的方形镜板。致动器设计为无万向节结构，包括一个带安装孔的中央连接平台和四组压电致动器，这些致动器通过蛇形弹簧连接到平台的四角。这种配置具有多自由度驱动能力，可实现尖端倾斜-活塞镜运动。压电致动器由串联的三级悬臂式致动单元组成，它们被有意布置成 S 形，以便完全隐藏在镜板下面。此外，通过优化每个执行单元上的电极覆盖区域，进一步提高了驱动性能。因此，不仅可以实现大位移，还可以实现近 100% 的填充因子和高光学利用效率。实验结果表明，制作完成的 MEMS 微镜在 ±50 VDC 驱动电压范围内，对两个正交轴的静态机械倾斜角约为±2.2°，活塞垂直移动量为±54.9 μm，线性度极佳。鉴于微镜具有大尺寸、高填充系数和多自由度运动等优点，该微镜可在光场整形、自由空间光通信和投影光刻等领域找到应用前景。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Sensors and Actuators A-physical 工程技术-工程：电子与电气

CiteScore

8.10

自引率

6.50%

发文量

630

审稿时长

49 days

期刊介绍： Sensors and Actuators A: Physical brings together multidisciplinary interests in one journal entirely devoted to disseminating information on all aspects of research and development of solid-state devices for transducing physical signals. Sensors and Actuators A: Physical regularly publishes original papers, letters to the Editors and from time to time invited review articles within the following device areas: • Fundamentals and Physics, such as: classification of effects, physical effects, measurement theory, modelling of sensors, measurement standards, measurement errors, units and constants, time and frequency measurement. Modeling papers should bring new modeling techniques to the field and be supported by experimental results. • Materials and their Processing, such as: piezoelectric materials, polymers, metal oxides, III-V and II-VI semiconductors, thick and thin films, optical glass fibres, amorphous, polycrystalline and monocrystalline silicon. • Optoelectronic sensors, such as: photovoltaic diodes, photoconductors, photodiodes, phototransistors, positron-sensitive photodetectors, optoisolators, photodiode arrays, charge-coupled devices, light-emitting diodes, injection lasers and liquid-crystal displays. • Mechanical sensors, such as: metallic, thin-film and semiconductor strain gauges, diffused silicon pressure sensors, silicon accelerometers, solid-state displacement transducers, piezo junction devices, piezoelectric field-effect transducers (PiFETs), tunnel-diode strain sensors, surface acoustic wave devices, silicon micromechanical switches, solid-state flow meters and electronic flow controllers. Etc...