High density nanofluidic channels by self-sealing for metallic nanoparticles detection

IF 2.6 4区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Microelectronic Engineering Pub Date : 2024-09-10 DOI:10.1016/j.mee.2024.112264

Wentao Yuan , Qingxin Wu , Shuoqiu Tian , Jinyu Guo , Kangping Liu , Yifang Chen

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Abstract

High density nanofluidic channels were successfully fabricated by a novel process, nicknamed as self-sealing process, for the detection of metal nanoparticles dispersed in water using color changes excited by polarized electromagnetic waves. The permittivities of aqueous solutions with various concentrations of metal nanoparticles were calculated by a corrected plasma model. Systematic simulations using finite difference time domain method were carried out in investigating the detection capabilities of the nanofluidic channels for silver, beryllium and copper nanoparticles in water. The pronounced color shifts indicates that the channels possess high sensitivity in the metal nanoparticles detection. The designed nanofluidic channels were then fabricated by a direct flood deposition of a silica film on a pre-replicated hydrogen silsesquioxan (HSQ) grating using electron beam lithography (EBL). The self-sealing technique possesses advantages in simplified processing, encapsulation free and potential of multi-layer nanochannels.

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用于金属纳米粒子检测的自密封高密度纳米流体通道

通过一种昵称为 "自密封工艺 "的新工艺成功制造了高密度纳米流体通道，用于利用偏振电磁波激发的颜色变化检测分散在水中的金属纳米颗粒。采用修正等离子体模型计算了含有不同浓度金属纳米颗粒的水溶液的介电常数。在研究纳米流体通道对水中银、铍和铜纳米粒子的检测能力时，使用有限差分时域法进行了系统模拟。明显的颜色偏移表明，纳米流体通道在金属纳米颗粒检测方面具有很高的灵敏度。然后，利用电子束光刻（EBL）技术，在预先复制的氢硅烷基二氧杂环丁烷（HSQ）光栅上直接淹没沉积二氧化硅薄膜，从而制造出设计的纳米流体通道。自密封技术具有简化加工、无封装和多层纳米通道潜力等优点。

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来源期刊

Microelectronic Engineering 工程技术-工程：电子与电气

CiteScore

5.30

自引率

4.30%

发文量

131

审稿时长

29 days

期刊介绍： Microelectronic Engineering is the premier nanoprocessing, and nanotechnology journal focusing on fabrication of electronic, photonic, bioelectronic, electromechanic and fluidic devices and systems, and their applications in the broad areas of electronics, photonics, energy, life sciences, and environment. It covers also the expanding interdisciplinary field of "more than Moore" and "beyond Moore" integrated nanoelectronics / photonics and micro-/nano-/bio-systems. Through its unique mixture of peer-reviewed articles, reviews, accelerated publications, short and Technical notes, and the latest research news on key developments, Microelectronic Engineering provides comprehensive coverage of this exciting, interdisciplinary and dynamic new field for researchers in academia and professionals in industry.