Deformable mirror driven by piezoelectric thin film based on multi-electrode array

IF 4.1 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical Pub Date : 2024-09-04 DOI:10.1016/j.sna.2024.115876

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引用次数: 0

Abstract

This paper designs and fabricates a MEMS deformable mirror with 61 electrodes driven by piezoelectric thin films (PZT) to achieve high voltage. This approach effectively corrects wavefront aberrations. Initially, the structural design and MEMS process scheme for the proposed deformable mirror are determined. Numerical simulations of electrode effects are conducted, and the working voltage and motion performance of the reflective mirror are tested using a digital interferometer. Experimental measurements of the surface deformation displacement of deformable mirrors with different electrodes are performed. A comparison of the simulation and experimental results indicates small coupling effects among the designed deformable mirror electrodes. The applied voltage and displacement response exhibit good linearity. Finally, based on the Zernike matrix model, the mirror surface shape is controlled, and Zernike polynomials of orders 2–4 are fitted. The results demonstrate that the deformable mirror has a high correction efficiency for low-order aberrations. Therefore, the proposed MEMS deformable mirror based on PZT piezoelectric thin films exhibits excellent motion and optical correction capabilities.

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基于多电极阵列的压电薄膜驱动可变形镜子

本文设计并制造了一种 MEMS 可变形镜，其中有 61 个电极由压电薄膜（PZT）驱动，以实现高电压。这种方法能有效校正波前像差。首先，确定了拟议的可变形镜的结构设计和 MEMS 工艺方案。对电极效应进行了数值模拟，并使用数字干涉仪测试了反射镜的工作电压和运动性能。对带有不同电极的可变形反射镜的表面变形位移进行了实验测量。模拟和实验结果的比较表明，所设计的可变形反射镜电极之间的耦合效应很小。外加电压和位移响应呈现出良好的线性关系。最后，基于 Zernike 矩阵模型，对镜面形状进行了控制，并拟合了 2-4 阶 Zernike 多项式。结果表明，可变形反射镜对低阶像差具有很高的校正效率。因此，基于 PZT 压电薄膜的 MEMS 可变形镜具有出色的运动和光学校正能力。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Sensors and Actuators A-physical 工程技术-工程：电子与电气

CiteScore

8.10

自引率

6.50%

发文量

630

审稿时长

49 days

期刊介绍： Sensors and Actuators A: Physical brings together multidisciplinary interests in one journal entirely devoted to disseminating information on all aspects of research and development of solid-state devices for transducing physical signals. Sensors and Actuators A: Physical regularly publishes original papers, letters to the Editors and from time to time invited review articles within the following device areas: • Fundamentals and Physics, such as: classification of effects, physical effects, measurement theory, modelling of sensors, measurement standards, measurement errors, units and constants, time and frequency measurement. Modeling papers should bring new modeling techniques to the field and be supported by experimental results. • Materials and their Processing, such as: piezoelectric materials, polymers, metal oxides, III-V and II-VI semiconductors, thick and thin films, optical glass fibres, amorphous, polycrystalline and monocrystalline silicon. • Optoelectronic sensors, such as: photovoltaic diodes, photoconductors, photodiodes, phototransistors, positron-sensitive photodetectors, optoisolators, photodiode arrays, charge-coupled devices, light-emitting diodes, injection lasers and liquid-crystal displays. • Mechanical sensors, such as: metallic, thin-film and semiconductor strain gauges, diffused silicon pressure sensors, silicon accelerometers, solid-state displacement transducers, piezo junction devices, piezoelectric field-effect transducers (PiFETs), tunnel-diode strain sensors, surface acoustic wave devices, silicon micromechanical switches, solid-state flow meters and electronic flow controllers. Etc...