The impact of BBr3/TiCl4 ratios on the microstructural and mechanical characteristics of TiBN coatings deposited using a pulsed-PACVD technique

IF 4.2 2区材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY

International Journal of Refractory Metals & Hard Materials Pub Date : 2024-09-01 DOI:10.1016/j.ijrmhm.2024.106851

Meisam Mahdavi , Amir Abdollah-Zadeh , Hassan Elmkhah

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引用次数: 0

Abstract

This study aimed to investigate the impact of precursor ratios on both the microstructural and tribological characteristics of TiBN coatings. Using the PACVD process, TiN, TiB₂, and three variations of TiBN coatings with adjusted BBr₃/TiCl₄ ratios were applied onto H13 substrates. The coatings were characterized using XRD, FESEM, TEM, AFM, nanoindentation, and nanoscratch methods to analyze their microstructural properties, surface morphology, and mechanical behavior. The findings revealed that the TiBN coatings possessed a nanocomposite structure with TiN crystals dispersed within the BN matrix, which is amorphous. Moreover, the augmentation of the BBr₃/TiCl₄ ratio from 0 to 1/3 resulted in a significant rise in the hardness value, from 13.4 GPa to 25.7 GPa. However, a further increase in the ratio from 1/3 to 3/3 resulted in a decrease in hardness to 14.4 GPa because cracks were formed in the deposited coating. In comparison, the TiB₂ coating exhibited a higher hardness of 19.7 GPa due to strong TiB bonds within the coating. The TiBN coating, applied with a BBr₃/TiCl₄ ratio of 1/3, demonstrated the lowest wear volume of 0.10 × 10⁻¹⁸ m³, attributed to its higher hardness and smoother surface texture.

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BBr3/TiCl4 比率对采用脉冲-PACVD 技术沉积的 TiBN 涂层的微观结构和机械特性的影响

本研究旨在探讨前驱体比率对 TiBN 涂层微观结构和摩擦学特性的影响。采用 PACVD 工艺，将 TiN、TiB2 和三种不同比例的 TiBN 涂层应用于 H13 基底。使用 XRD、FESEM、TEM、AFM、纳米压痕和纳米划痕方法对涂层进行了表征，以分析其微观结构特性、表面形貌和机械行为。研究结果表明，TiBN 涂层具有纳米复合结构，TiN 晶体分散在无定形的 BN 基体中。此外，将 BBr3/TiCl4 的比例从 0 提高到 1/3，硬度值从 13.4 GPa 显著提高到 25.7 GPa。但是，如果将比率从 1/3 进一步提高到 3/3，硬度则会下降到 14.4 GPa，因为沉积涂层中会出现裂纹。相比之下，TiB2 涂层的硬度更高，达到 19.7 GPa，这是因为涂层中的 TiB 键很强。BBr3/TiCl4 比率为 1/3 的 TiBN 涂层的磨损体积最小，仅为 0.10 × 10-18 m3，这归功于其更高的硬度和更光滑的表面纹理。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

$International Journal of Refractory Metals & Hard Materials$

International Journal of Refractory Metals & Hard Materials 工程技术-材料科学：综合

CiteScore

7.00

自引率

13.90%

发文量

236

审稿时长

35 days

期刊介绍： The International Journal of Refractory Metals and Hard Materials (IJRMHM) publishes original research articles concerned with all aspects of refractory metals and hard materials. Refractory metals are defined as metals with melting points higher than 1800 °C. These are tungsten, molybdenum, chromium, tantalum, niobium, hafnium, and rhenium, as well as many compounds and alloys based thereupon. Hard materials that are included in the scope of this journal are defined as materials with hardness values higher than 1000 kg/mm2, primarily intended for applications as manufacturing tools or wear resistant components in mechanical systems. Thus they encompass carbides, nitrides and borides of metals, and related compounds. A special focus of this journal is put on the family of hardmetals, which is also known as cemented tungsten carbide, and cermets which are based on titanium carbide and carbonitrides with or without a metal binder. Ceramics and superhard materials including diamond and cubic boron nitride may also be accepted provided the subject material is presented as hard materials as defined above.