Direct electron beam writing of silver using a β-diketonate precursor: first insights.

IF 2.6 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY
Beilstein Journal of Nanotechnology Pub Date : 2024-08-26 eCollection Date: 2024-01-01 DOI:10.3762/bjnano.15.90
Katja Höflich, Krzysztof Maćkosz, Chinmai S Jureddy, Aleksei Tsarapkin, Ivo Utke
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引用次数: 0

Abstract

Direct electron beam writing is a powerful tool for fabricating complex nanostructures in a single step. The electron beam locally cleaves the molecules of an adsorbed gaseous precursor to form a deposit, similar to 3D printing but without the need for a resist or development step. Here, we employ for the first time a silver β-diketonate precursor for focused electron beam-induced deposition (FEBID). The used compound (hfac)AgPMe3 operates at an evaporation temperature of 70-80 °C and is compatible with commercially available gas injection systems used in any standard scanning electron microscope. Growth of smooth 3D geometries could be demonstrated for tightly focused electron beams, albeit with low silver content in the deposit volume. The electron beam-induced deposition proved sensitive to the irradiation conditions, leading to varying compositions of the deposit and internal inhomogeneities such as the formation of a layered structure consisting of a pure silver layer at the interface to the substrate covered by a deposit layer with low silver content. Imaging after the deposition process revealed morphological changes such as the growth of silver particles on the surface. While these effects complicate the application for 3D printing, the unique deposit structure with a thin, compact silver film beneath the deposit body is interesting from a fundamental point of view and may offer additional opportunities for applications.

使用β-二酮酸酯前驱体的直接电子束写银:初探。
直接电子束写入是一种功能强大的工具,只需一步即可制造出复杂的纳米结构。电子束在局部裂解吸附的气态前驱体分子,形成沉积物,类似于三维打印,但无需光刻胶或显影步骤。在这里,我们首次采用了β-二酮酸银前驱体进行聚焦电子束诱导沉积(FEBID)。所使用的 (hfac)AgPMe3 化合物的蒸发温度为 70-80 °C,与任何标准扫描电子显微镜中使用的市售气体注入系统兼容。尽管沉积体积中的银含量较低,但在电子束紧密聚焦的情况下,也能生长出光滑的三维几何形状。事实证明,电子束诱导沉积对辐照条件非常敏感,会导致沉积物成分的变化和内部的不均匀性,例如形成分层结构,在与基底的界面上形成纯银层,银含量较低的沉积层覆盖在纯银层上。沉积过程后的成像显示了形态变化,如表面银颗粒的生长。虽然这些影响使三维打印的应用变得复杂,但从根本上看,沉积体下方有一层薄而紧密的银膜的独特沉积结构非常有趣,并可能为应用提供更多机会。
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来源期刊
Beilstein Journal of Nanotechnology
Beilstein Journal of Nanotechnology NANOSCIENCE & NANOTECHNOLOGY-MATERIALS SCIENCE, MULTIDISCIPLINARY
CiteScore
5.70
自引率
3.20%
发文量
109
审稿时长
2 months
期刊介绍: The Beilstein Journal of Nanotechnology is an international, peer-reviewed, Open Access journal. It provides a unique platform for rapid publication without any charges (free for author and reader) – Platinum Open Access. The content is freely accessible 365 days a year to any user worldwide. Articles are available online immediately upon publication and are publicly archived in all major repositories. In addition, it provides a platform for publishing thematic issues (theme-based collections of articles) on topical issues in nanoscience and nanotechnology. The journal is published and completely funded by the Beilstein-Institut, a non-profit foundation located in Frankfurt am Main, Germany. The editor-in-chief is Professor Thomas Schimmel – Karlsruhe Institute of Technology. He is supported by more than 20 associate editors who are responsible for a particular subject area within the scope of the journal.
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