Fabrication of high-Q suspended AlGaAs microresonators for efficient Kerr comb generation

IF 3.5 2区物理与天体物理 Q2 PHYSICS, APPLIED

Applied Physics Letters Pub Date : 2024-08-29 DOI:10.1063/5.0219095

Yuqian Zhang, Changzheng Sun, Bing Xiong, Jian Wang, Zhibiao Hao, Lai Wang, Yanjun Han, Hongtao Li, Yi Luo

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引用次数: 0

Abstract

AlGaAs is a promising integrated nonlinear photonics material with enormous optical nonlinearity and high refractive index. Nevertheless, presently AlGaAs microring resonators exhibiting high-quality factors and tight optical confinement rely predominantly on wafer bonding techniques, which entail an intricate fabrication process. Here, we present suspended AlGaAs waveguides and resonators as a viable platform for high efficiency integrated nonlinear photonics. The suspended microring resonator formed by combined plasma dry etching and chemical wet etching exhibits an intrinsic quality factor Q of 2.1×106, corresponding to an optical loss of 0.28 dB/cm, and Kerr comb generation with milliwatt level threshold is recorded. The proposed scheme can be implemented with a relatively simple fabrication process, as it eliminates the need for wafer bonding. Without the hinderance of SiO2 or Al2O3 claddings, the air-clad suspended AlGaAs platform lends itself directly to applications in the mid-infrared region. Our demonstration opens up a prospect for employing AlGaAs devices in integrated nonlinear photonics.

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制造高 Q 值悬浮式 AlGaAs 微谐振器，实现高效克尔梳生成

砷化镓是一种前景广阔的集成非线性光子材料，具有巨大的光学非线性和高折射率。然而，目前 AlGaAs 微波谐振器主要依靠晶圆键合技术来实现高质量系数和紧密的光学约束，这需要复杂的制造工艺。在此，我们提出了悬浮式 AlGaAs 波导和谐振器，作为高效集成非线性光子学的可行平台。通过等离子干法蚀刻和化学湿法蚀刻相结合形成的悬浮微孔谐振器显示出 2.1×106 的本征品质因数 Q，相当于 0.28 dB/cm 的光学损耗，并记录到毫瓦级阈值的克尔梳生成。由于无需晶圆键合，拟议方案的制造工艺相对简单。由于没有二氧化硅或氧化铝包层的阻碍，空气包层悬浮砷化镓平台可直接应用于中红外区域。我们的演示为在集成非线性光子学中采用 AlGaAs 器件开辟了前景。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Applied Physics Letters 物理-物理：应用

CiteScore

6.40

自引率

10.00%

发文量

1821

审稿时长

1.6 months

期刊介绍： Applied Physics Letters (APL) features concise, up-to-date reports on significant new findings in applied physics. Emphasizing rapid dissemination of key data and new physical insights, APL offers prompt publication of new experimental and theoretical papers reporting applications of physics phenomena to all branches of science, engineering, and modern technology. In addition to regular articles, the journal also publishes invited Fast Track, Perspectives, and in-depth Editorials which report on cutting-edge areas in applied physics. APL Perspectives are forward-looking invited letters which highlight recent developments or discoveries. Emphasis is placed on very recent developments, potentially disruptive technologies, open questions and possible solutions. They also include a mini-roadmap detailing where the community should direct efforts in order for the phenomena to be viable for application and the challenges associated with meeting that performance threshold. Perspectives are characterized by personal viewpoints and opinions of recognized experts in the field. Fast Track articles are invited original research articles that report results that are particularly novel and important or provide a significant advancement in an emerging field. Because of the urgency and scientific importance of the work, the peer review process is accelerated. If, during the review process, it becomes apparent that the paper does not meet the Fast Track criterion, it is returned to a normal track.