Thermal oxidation CuO nanowire gas sensor for ozone detection applications

IF 6.5 Q1 BIOTECHNOLOGY & APPLIED MICROBIOLOGY

Sensors and Actuators Reports Pub Date : 2024-08-06 DOI:10.1016/j.snr.2024.100228

Li-Tsen Lai , Han-Ting Hsueh , Chi-Hung Chiu , Tsung-Chieh Cheng , Shoou-Jinn Chang

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引用次数: 0

Abstract

In this study, cupric oxide nanowires (CuO NWs) on patterned interdigitated electrodes (PIEs) used as ozone (O₃) gas sensors, were successfully fabricated using thermal oxidation and the microelectromechanical systems (MEMS) technique. After the thermal oxidation process, CuO NWs with different heights and densities were fabricated using a pure copper seed layer with a thickness ranging from 0.5 μm to 2 μm. In this experiment, a low temperature, low concentration, and repeatable CuO NWs gas sensor was fabricated, which can detect O₃ gas at a low concentration of 50 ppb and low temperature of 100°C with a high sensor response (40%). The concentration response of this gas sensor shows an increasing linear trend, with an increase of O₃ concentration in the range of 50 ppb - 300 ppb. Additionally, the results indicated that this CuO NWs gas sensor is more selective for O₃ than CO, CO₂, C₂H₅OH, C₃H₆O, NO₂, or NH₃. While CuO has been less studied in O₃ detection compared with other semiconducting metal oxide materials, CuO NWs show potential applications in gas sensing devices for low-temperature and low-concentration O₃ environmental monitoring.

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用于臭氧检测应用的热氧化氧化铜纳米线气体传感器

本研究利用热氧化和微机电系统 (MEMS) 技术，成功地在图案化插接电极 (PIE) 上制造出了用作臭氧 (O3) 气体传感器的氧化铜纳米线 (CuO纳米线)。经过热氧化处理后，利用厚度为 0.5 μm 至 2 μm 的纯铜种子层制造出了不同高度和密度的 CuO NW。该传感器可在 50 ppb 的低浓度和 100°C 的低温条件下检测 O3 气体，并具有较高的传感器响应（40%）。随着 O3 浓度在 50 ppb - 300 ppb 范围内的增加，该气体传感器的浓度响应呈线性上升趋势。此外，研究结果表明，这种 CuO NWs 气体传感器对 O3 的选择性高于 CO、CO2、C2H5OH、C3H6O、NO2 或 NH3。虽然与其他半导体金属氧化物材料相比，CuO 在 O3 检测方面的研究较少，但 CuO NWs 在低温和低浓度 O3 环境监测的气体传感设备中显示出潜在的应用前景。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Sensors and Actuators Reports Multiple-

CiteScore

9.60

自引率

0.00%

发文量

审稿时长

49 days

期刊介绍： Sensors and Actuators Reports is a peer-reviewed open access journal launched out from the Sensors and Actuators journal family. Sensors and Actuators Reports is dedicated to publishing new and original works in the field of all type of sensors and actuators, including bio-, chemical-, physical-, and nano- sensors and actuators, which demonstrates significant progress beyond the current state of the art. The journal regularly publishes original research papers, reviews, and short communications. For research papers and short communications, the journal aims to publish the new and original work supported by experimental results and as such purely theoretical works are not accepted.