Cr-induced structural phase transformation in sputter deposited poly-AlN thin film from wurtzite to rocksalt structure and their effect on the optical properties
IF 5.3 3区 材料科学Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY
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引用次数: 0
Abstract
We report Cr doping-induced structural phase transformation (PT) in sputter-deposited polycrystalline-AlN thin film from wurtzite (w) to rocksalt (r) structure. Rietveld analysis shows that the steady substitution of Al ions by Cr ions in the w-AlN lattice distorts and compresses the wurtzite lattice along the c-axis. The chemical pressure exerted in the w-AlN lattice by the compression from the doped Cr ions causes the PT, similar to the high-pressure-induced PT in AlN. Post the PT, the r-Al1-xCrxN thin film continues to exhibit compressive residual stress, indicating that such sustained stress may also play a role in stabilizing the metastable r-Al1-xCrxN phase. The structural distortion and the PT also affected the optical absorption characteristics of the w-Al1-xCrxN thin films. The w-Al1-xCrxN exhibit a direct inter-band transition and the band gap (Eg) decreases from ∼ 6.06 eV for pure w-AlN to ∼ 4.15 eV for w-Al0.73Cr0.27N. After the PT, the r-Al0.61Cr0.39N thin film, on the other hand, exhibits an indirect inter-band transition with an Eg of ∼ 1.84 eV. In addition to the change in Eg, a prominent defect band appears at ∼ 4 eV at low Cr% and another band appears at ∼ 0.98 eV at higher Cr%.
期刊介绍:
Materials Research Bulletin is an international journal reporting high-impact research on processing-structure-property relationships in functional materials and nanomaterials with interesting electronic, magnetic, optical, thermal, mechanical or catalytic properties. Papers purely on thermodynamics or theoretical calculations (e.g., density functional theory) do not fall within the scope of the journal unless they also demonstrate a clear link to physical properties. Topics covered include functional materials (e.g., dielectrics, pyroelectrics, piezoelectrics, ferroelectrics, relaxors, thermoelectrics, etc.); electrochemistry and solid-state ionics (e.g., photovoltaics, batteries, sensors, and fuel cells); nanomaterials, graphene, and nanocomposites; luminescence and photocatalysis; crystal-structure and defect-structure analysis; novel electronics; non-crystalline solids; flexible electronics; protein-material interactions; and polymeric ion-exchange membranes.