Automated and parallel transfer of arrays of oriented graphene ribbons

IF 9.1 2区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY
Amira Bencherif, Monique Tie, Richard Martel, Delphine Bouilly
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引用次数: 0

Abstract

The transfer of two-dimensional materials from their growth substrate onto application wafers is a critical bottleneck in scaling-up devices based on such nanomaterials. Here, we present an innovative approach to achieve the automated and simultaneous transfer of arrays of graphene ribbons, with precise control over their orientation and alignment onto patterned wafers. The transfer is performed in a simple, yet efficient apparatus consisting of an array of glass columns, strategically shaped to control ribbon orientation and arranged to match the destination wafer, coupled to a dual inflow/outflow pumping system. This apparatus enables the transfer of a custom array of parallel graphene ribbons in a fraction of the time required with traditional methods. The quality of the transferred graphene was evaluated using optical imaging, scanning electron microscopy, hyperspectral Raman imaging, and electrical transport: all consistently indicating that the transferred graphene exhibits excellent quality, comparable to a manual transfer by an expert user. The proposed apparatus offers several competitive advantages, including ease of use, high transfer throughput, and reduced nanomaterial consumption. Moreover, it can be used repeatedly on the same wafer to assemble arrays of overlayed materials with controlled relative orientations. This approach thus opens promising opportunities for the large-scale fabrication of various heterostructures and devices based on vertical assemblies of 2D nanomaterials.

Abstract Image

Abstract Image

自动并行转移定向石墨烯带阵列
将二维材料从其生长基底转移到应用晶片上是扩大基于此类纳米材料的设备规模的关键瓶颈。在此,我们提出了一种创新方法,可实现石墨烯带阵列的自动同步转移,并精确控制其在图案晶片上的定向和对齐。转移是在一个简单而高效的设备中进行的,该设备由玻璃柱阵列组成,具有控制石墨烯带方向的策略性形状,并与目标晶片相匹配,与双流入/流出泵系统相连接。这种设备只需传统方法所需的一小部分时间,就能转移定制的平行石墨烯带阵列。使用光学成像、扫描电子显微镜、高光谱拉曼成像和电传输对转移的石墨烯的质量进行了评估:所有这些都一致表明,转移的石墨烯质量极佳,可与专家用户的手动转移相媲美。所提出的设备具有多项竞争优势,包括使用方便、转移通量高、纳米材料消耗少。此外,它还可以在同一晶圆上重复使用,以可控的相对方向组装叠层材料阵列。因此,这种方法为基于二维纳米材料垂直组装的各种异质结构和器件的大规模制造带来了大好机会。
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来源期刊
npj 2D Materials and Applications
npj 2D Materials and Applications Engineering-Mechanics of Materials
CiteScore
14.50
自引率
2.10%
发文量
80
审稿时长
15 weeks
期刊介绍: npj 2D Materials and Applications publishes papers on the fundamental behavior, synthesis, properties and applications of existing and emerging 2D materials. By selecting papers with the potential for impact, the journal aims to facilitate the transfer of the research of 2D materials into wide-ranging applications.
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