Lorentz Force-Actuated Bidirectional Nanoelectromechanical Switch with an Ultralow Operation Voltage.

IF 11.3 1区 化学 Q1 CHEMISTRY, PHYSICAL
ACS Catalysis Pub Date : 2024-09-18 Epub Date: 2024-07-31 DOI:10.1021/acs.nanolett.4c01999
Dianlun Li, Jiang Yan, Ying Zhang, Junzhuan Wang, Linwei Yu
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引用次数: 0

Abstract

The high operating voltage of conventional nanoelectromechanical switches, typically tens of volts, is much higher than the driving voltage of the complementary metal oxide semiconductor integrated circuit (∼1 V). Though the operating voltage can be reduced by adopting a narrow air gap, down to several nanometers, this leads to formidable manufacturing challenges and occasionally irreversible switch failures due to the surface adhesive force. Here, we demonstrate a new nanowire-morphed nanoelectromechanical (NW-NEM) switch structure with ultralow operation voltages. In contrast to conventional nanoelectromechanical switches actuated by unidirectional electrostatic attraction, the NW-NEM switch is bidirectionally driven by Lorentz force to allow the use of a large air gap for excellent electrical isolation, while achieving a record-low driving voltage of <0.2 V. Furthermore, the introduction of the Lorentz force allows the NW-NEM switch to effectively overcome the adhesion force to recover to the turn-off state.

Abstract Image

具有超低工作电压的洛伦兹力驱动双向纳米机电开关
传统纳米机电开关的工作电压很高,通常为几十伏,远高于互补金属氧化物半导体集成电路的驱动电压(1 V)。虽然可以通过采用小至几个纳米的窄气隙来降低工作电压,但这会带来巨大的制造挑战,有时还会因表面粘附力而导致开关不可逆转地失效。在这里,我们展示了一种具有超低工作电压的新型纳米线蜕变纳米机电(NW-NEM)开关结构。与传统的由单向静电吸引驱动的纳米机电开关不同,NW-NEM 开关是由洛伦兹力双向驱动的,因此可以使用大气隙实现出色的电气隔离,同时实现了创纪录的低驱动电压,即
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来源期刊
ACS Catalysis
ACS Catalysis CHEMISTRY, PHYSICAL-
CiteScore
20.80
自引率
6.20%
发文量
1253
审稿时长
1.5 months
期刊介绍: ACS Catalysis is an esteemed journal that publishes original research in the fields of heterogeneous catalysis, molecular catalysis, and biocatalysis. It offers broad coverage across diverse areas such as life sciences, organometallics and synthesis, photochemistry and electrochemistry, drug discovery and synthesis, materials science, environmental protection, polymer discovery and synthesis, and energy and fuels. The scope of the journal is to showcase innovative work in various aspects of catalysis. This includes new reactions and novel synthetic approaches utilizing known catalysts, the discovery or modification of new catalysts, elucidation of catalytic mechanisms through cutting-edge investigations, practical enhancements of existing processes, as well as conceptual advances in the field. Contributions to ACS Catalysis can encompass both experimental and theoretical research focused on catalytic molecules, macromolecules, and materials that exhibit catalytic turnover.
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