Rezkia Dewi Andajani;Masayoshi Todorokihara;Akito Araya;Takeshi Tsuji
{"title":"Quartz Enhanced Micro Electromechanical Systems Accelerometer for Seismic Monitoring: Field Performance in Volcanic Region","authors":"Rezkia Dewi Andajani;Masayoshi Todorokihara;Akito Araya;Takeshi Tsuji","doi":"10.1109/JSEN.2024.3431937","DOIUrl":null,"url":null,"abstract":"This article introduces a novel Quartz micro electromechanical systems (QMEMSs) accelerometer, providing detailed insights into its design, system architecture, performance, and field testing. Diverging from traditional micro-electromechanical systems (MEMS) accelerometers, this device employs a quartz resonator as an acceleration-to-frequency transducer. The QMEMS-enhanced design features a double-ended tuning fork (DETF) resonator with high sensitivity (~120 Hz/G). The system includes a three-axis sensor module, open-loop oscillation circuits, and a sigma accumulation time-to-digital converter (TDC) for precise frequency measurement. The compact, aluminum-encased accelerometer, with a ±15 g dynamic range (DR), exhibits remarkable stability and performance under various temperatures. With a specific focus on seismicity monitoring applications, a field test was conducted in the volcanic region of Mt. Aso, Kyushu Island, Japan, comparing the accelerometer with a conventional velocity-type seismometer. Our result indicates that QMEMS accelerometer can detect high- and low-frequency earthquake signals comparable to the velocity-type seismometer by focusing the frequency band close to the frequency of the seismic events. This highlights its efficacy in capturing a broad spectrum of seismic activities in volcanic regions.","PeriodicalId":447,"journal":{"name":"IEEE Sensors Journal","volume":null,"pages":null},"PeriodicalIF":4.3000,"publicationDate":"2024-07-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Sensors Journal","FirstCategoryId":"103","ListUrlMain":"https://ieeexplore.ieee.org/document/10612774/","RegionNum":2,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
Abstract
This article introduces a novel Quartz micro electromechanical systems (QMEMSs) accelerometer, providing detailed insights into its design, system architecture, performance, and field testing. Diverging from traditional micro-electromechanical systems (MEMS) accelerometers, this device employs a quartz resonator as an acceleration-to-frequency transducer. The QMEMS-enhanced design features a double-ended tuning fork (DETF) resonator with high sensitivity (~120 Hz/G). The system includes a three-axis sensor module, open-loop oscillation circuits, and a sigma accumulation time-to-digital converter (TDC) for precise frequency measurement. The compact, aluminum-encased accelerometer, with a ±15 g dynamic range (DR), exhibits remarkable stability and performance under various temperatures. With a specific focus on seismicity monitoring applications, a field test was conducted in the volcanic region of Mt. Aso, Kyushu Island, Japan, comparing the accelerometer with a conventional velocity-type seismometer. Our result indicates that QMEMS accelerometer can detect high- and low-frequency earthquake signals comparable to the velocity-type seismometer by focusing the frequency band close to the frequency of the seismic events. This highlights its efficacy in capturing a broad spectrum of seismic activities in volcanic regions.
期刊介绍:
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