Influence of hydrogen doping of In2O3-based transparent conducting oxide films on silicon heterojunction solar cells

IF 3.5 3区材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY

Journal of Materials Science Pub Date : 2024-07-26 DOI:10.1007/s10853-024-09506-7

Hyeong Gi Park, Shahzada Qamar Hussain, Jinjoo Park, Junsin Yi

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Abstract

We report the influence of hydrogen doping of In₂O₃-based transparent conducting oxide (TCO) films, including indium tin oxide (ITO), hydrogenated ITO (ITO:H), In₂O₃ (IO), and hydrogenated In₂O₃ (IO:H), using radio-frequency magnetron sputtering for SHJ solar cells. The purpose of hydrogen doping is to improve the sheet resistance and work function, while Ar-based ITO films play a critical role in maintaining the electrical and optical properties. The thickness of all TCO films was fixed at 100 nm, which showed the lowest sheet resistance of 34 Ω/sq for the IO:H films. All the films showed an average transmission of more than 87% in the visible-wavelength (400–800 nm) region. The work function was enhanced from 4.96 to 5.45 eV with a hydrogen of 3 sccm. SHJ solar cells using IO:H films achieved an efficiency of 23.6% with an open-circuit voltage (V_OC) of 736 mV, a current density (J_SC) of 38.83 mA/cm² and a fill factor (FF) of 82.62%. We performed an improvement in the conversion efficiency of the device with a simulation using the AFORS-HET (automatic for the simulation of heterostructures) program. The efficiency achieved was 25.41% when V_OC = 729 mV, J_SC = 41.3 mA/cm², FF = 84.42%.

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基于 In2O3 的透明导电氧化物薄膜的氢掺杂对硅异质结太阳能电池的影响

我们报告了利用射频磁控溅射技术对 In2O3 基透明导电氧化物 (TCO) 薄膜（包括氧化铟锡 (ITO)、氢化 ITO (ITO:H)、In2O3 (IO) 和氢化 In2O3 (IO:H)）进行氢掺杂对 SHJ 太阳能电池的影响。掺氢的目的是提高薄膜电阻和功函数，而基于氩气的 ITO 薄膜在保持电气和光学特性方面起着关键作用。所有 TCO 薄膜的厚度都固定为 100 nm，其中 IO:H 薄膜的片电阻最低，为 34 Ω/sq。所有薄膜在可见光波长（400-800 纳米）区域的平均透射率都超过了 87%。在氢气为 3 sccm 的情况下，功函数从 4.96 eV 提高到 5.45 eV。使用 IO:H 薄膜的 SHJ 太阳能电池效率达到 23.6%，开路电压 (VOC) 为 736 mV，电流密度 (JSC) 为 38.83 mA/cm2，填充因子 (FF) 为 82.62%。我们使用 AFORS-HET（异质结构自动仿真）程序进行了模拟，从而提高了器件的转换效率。当 VOC = 729 mV、JSC = 41.3 mA/cm2、FF = 84.42% 时，转换效率为 25.41%。

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来源期刊

Journal of Materials Science 工程技术-材料科学：综合

CiteScore

7.90

自引率

4.40%

发文量

1297

审稿时长

2.4 months

期刊介绍： The Journal of Materials Science publishes reviews, full-length papers, and short Communications recording original research results on, or techniques for studying the relationship between structure, properties, and uses of materials. The subjects are seen from international and interdisciplinary perspectives covering areas including metals, ceramics, glasses, polymers, electrical materials, composite materials, fibers, nanostructured materials, nanocomposites, and biological and biomedical materials. The Journal of Materials Science is now firmly established as the leading source of primary communication for scientists investigating the structure and properties of all engineering materials.