Powering from behind

IF 33.7 1区工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

Nature Electronics Pub Date : 2024-07-24 DOI:10.1038/s41928-024-01226-9

Stuart Thomas

引用次数: 0

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从后面提供动力

背面功率分配网络方案--将集成电路中的功率传输转移到硅晶片的背面--有望帮助提高互补金属氧化物半导体（CMOS）电路的功率效率和性能，并有可能提高其扩展能力，特别是在基于硅纳米片的下一代晶体管技术中。然而，如何最好地实现背面功率分配并提供单元级扩展优势仍不清楚。来自 IBM Research 和三星电子的研究人员开发了一种直接背面接触方法，无需在源极和漏极上进行电源接触，也无需通常所需的深沟通孔。在纳米片宽度和 n 型到 p 型晶体管间距不变的情况下，直接背面接触方法与正面电源传输方案相比，可将电池高度降低 25%。为了制造这种结构，在源极和漏极外延层下形成了一个背面接触占位符，然后将其移除以形成背面接触。对采用正面和直接背面接触供电的器件的传输曲线进行比较后发现，n 型和 p 型器件的性能非常接近，这表明该工艺对器件性能的影响微乎其微。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Nature Electronics Engineering-Electrical and Electronic Engineering

CiteScore

47.50

自引率

2.30%

发文量

159

期刊介绍： Nature Electronics is a comprehensive journal that publishes both fundamental and applied research in the field of electronics. It encompasses a wide range of topics, including the study of new phenomena and devices, the design and construction of electronic circuits, and the practical applications of electronics. In addition, the journal explores the commercial and industrial aspects of electronics research. The primary focus of Nature Electronics is on the development of technology and its potential impact on society. The journal incorporates the contributions of scientists, engineers, and industry professionals, offering a platform for their research findings. Moreover, Nature Electronics provides insightful commentary, thorough reviews, and analysis of the key issues that shape the field, as well as the technologies that are reshaping society. Like all journals within the prestigious Nature brand, Nature Electronics upholds the highest standards of quality. It maintains a dedicated team of professional editors and follows a fair and rigorous peer-review process. The journal also ensures impeccable copy-editing and production, enabling swift publication. Additionally, Nature Electronics prides itself on its editorial independence, ensuring unbiased and impartial reporting. In summary, Nature Electronics is a leading journal that publishes cutting-edge research in electronics. With its multidisciplinary approach and commitment to excellence, the journal serves as a valuable resource for scientists, engineers, and industry professionals seeking to stay at the forefront of advancements in the field.