Mateus G Masteghin, Benedict N Murdin, Dominic A Duffy, Steven K Clowes, David C Cox, Stephen J Sweeney, Roger P Webb
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引用次数: 0
Abstract
In this perspective article, we discuss the application of ion implantation to manipulate strain (by either neutralizing or inducing compressive or tensile states) in suspended thin films. Emphasizing the pressing need for a high-mobility silicon-compatible transistor or a direct bandgap group-IV semiconductor that is compatible with complementary metal-oxide-semiconductor technology, we underscore the distinctive features of different methods of ion beam-induced alteration of material morphology. The article examines the precautions needed during experimental procedures and data analysis and explores routes for potential scalable adoption by the semiconductor industry. Finally, we briefly discuss how this highly controllable strain-inducing technique can facilitate enhanced manipulation of impurity-based spin quantum bits (qubits).
在这篇展望文章中,我们讨论了离子注入在悬浮薄膜中操纵应变(通过中和或诱导压缩或拉伸状态)的应用。我们强调了对与硅兼容的高移动性晶体管或与互补金属氧化物半导体技术兼容的直接带隙第 IV 族半导体的迫切需要,强调了离子束诱导改变材料形态的不同方法的显著特点。文章研究了实验程序和数据分析过程中需要注意的事项,并探讨了半导体行业可能采用的可扩展方法。最后,我们简要讨论了这种高度可控的应变诱导技术如何促进增强对基于杂质的自旋量子比特(量子比特)的操纵。
期刊介绍:
Journal of Physics: Condensed Matter covers the whole of condensed matter physics including soft condensed matter and nanostructures. Papers may report experimental, theoretical and simulation studies. Note that papers must contain fundamental condensed matter science: papers reporting methods of materials preparation or properties of materials without novel condensed matter content will not be accepted.