X‐ray standing wave assisted XANES for depth dependent chemical state analysis of Cr in Cr2O3/Cr bilayer structure

IF 1.6 4区化学 Q4 CHEMISTRY, PHYSICAL

Surface and Interface Analysis Pub Date : 2024-07-18 DOI:10.1002/sia.7342

Ayushi Trivedi, Md. Akhlak Alam, Ajay Khooha, Rajnish Dhawan, Rajendra Kumar Sharma, Shilpa Tripathi, Manoj Kumar Tiwari

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Abstract

We report the detailed depth‐dependent structural and chemical analysis of the Cr2O3/Cr bilayer structure deposited on Si ˂100˃ substrate. The non‐destructive simultaneous X‐ray reflectivity and grazing incidence X‐ray fluorescence measurements were used for this purpose. Corresponding variation in the chemical state of Cr atoms as a function of depth has been studied using X‐ray standing wave (XSW) assisted X‐ray absorption near edge structure (XANES) measurements. Various oxidation states of Cr atoms present in the Cr2O3/Cr bilayer structure were determined using X‐ray photoelectron spectroscopy (XPS). Depth‐resolved XANES measurements confirmed the presence of chromium oxide (Cr2O3) and hydroxide (Cr (OH)3) at the top surface of the Cr2O3/Cr bilayer structure. The results also reveal the presence of metallic Cr along with its compounds Cr2O3 and Cr (OH)3 at the interface medium, showing significant mixing between the Cr2O3 and Cr layers. Our results clearly demonstrate that the XSW assisted XANES technique is extremely efficient for determining the variation of chemical states at the surface, interface, and different depths of a thin film structure. Such types of analysis are particularly useful for differentiating the presence of a metal from its own oxides, even at higher depths inside a thin film medium.

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利用 X 射线驻波辅助 XANES 对 Cr2O3/Cr 双层结构中的 Cr 进行深度依赖性化学态分析

我们报告了沉积在硅˂100˃基底上的 Cr2O3/Cr 双层结构的详细深度依赖性结构和化学分析。为此，我们采用了非破坏性的 X 射线反射率和掠入射 X 射线荧光同步测量法。利用 X 射线驻波（XSW）辅助 X 射线吸收近边缘结构（XANES）测量，研究了铬原子化学状态随深度的相应变化。利用 X 射线光电子能谱 (XPS) 测定了 Cr2O3/Cr 双层结构中存在的铬原子的各种氧化态。深度分辨 XANES 测量证实，在 Cr2O3/Cr 双层结构的顶层表面存在氧化铬 (Cr2O3) 和氢氧化物 (Cr (OH)3)。结果还显示，在界面介质中存在金属铬及其化合物 Cr2O3 和 Cr (OH)3，表明 Cr2O3 层和 Cr 层之间存在显著的混合。我们的研究结果清楚地表明，XSW 辅助 XANES 技术对于确定薄膜结构表面、界面和不同深度的化学状态变化极为有效。此类分析尤其有助于区分金属与其自身氧化物的存在，即使在薄膜介质的更深处也是如此。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Surface and Interface Analysis 化学-物理化学

CiteScore

3.30

自引率

5.90%

发文量

130

审稿时长

4.4 months

期刊介绍： Surface and Interface Analysis is devoted to the publication of papers dealing with the development and application of techniques for the characterization of surfaces, interfaces and thin films. Papers dealing with standardization and quantification are particularly welcome, and also those which deal with the application of these techniques to industrial problems. Papers dealing with the purely theoretical aspects of the technique will also be considered. Review articles will be published; prior consultation with one of the Editors is advised in these cases. Papers must clearly be of scientific value in the field and will be submitted to two independent referees. Contributions must be in English and must not have been published elsewhere, and authors must agree not to communicate the same material for publication to any other journal. Authors are invited to submit their papers for publication to John Watts (UK only), Jose Sanz (Rest of Europe), John T. Grant (all non-European countries, except Japan) or R. Shimizu (Japan only).