Random Telegraph Noise and Radiation Response of 80 nm Vertical Charge-Trapping NAND Flash Memory Devices With SiON Tunneling Oxide

IF 16.4 1区化学 Q1 CHEMISTRY, MULTIDISCIPLINARY

Accounts of Chemical Research Pub Date : 2024-07-19 DOI:10.1109/TNS.2024.3431436

Isabella R. Wynocker;En Xia Zhang;Robert A. Reed;Ronald D. Schrimpf;Antonio Arreghini;João P. Bastos;Geert Van den Bosch;Dimitri Linten;Daniel M. Fleetwood

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Abstract

Random telegraph noise (RTN) measurements are performed on as-processed, programmed, erased, and irradiated 80 nm vertical charge-trapping nand memory transistors. Variations in current with time of up to ±20% are observed during the RTN testing interval. The RTN of these devices is relatively unaffected by irradiation of devices to 500 krad(SiO2). Root-mean-square (rms) magnitudes of measured RTN exceed predictions of number-fluctuation models (NFMs) by up to six-times. This result demonstrates that fluctuations in carrier scattering rates caused by motion and/or reconfiguration of traps at grain boundaries likely lead to a significant fraction of the low-frequency noise and/or RTN in poly-crystalline Si channel, charge-trapping memory devices. The magnitudes of these fluctuations may present significant challenges to the resolution of highly scaled 3-D memory devices.

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采用 SiON 隧道氧化物的 80 纳米垂直电荷捕获 NAND 闪存设备的随机电报噪声和辐射响应

随机电报噪声（RTN）测量是在经过加工、编程、擦除和辐照的 80 纳米垂直电荷捕获 nand 存储器晶体管上进行的。在 RTN 测试期间，观察到电流随时间的变化高达 ±20%。将这些器件辐照至 500 krad(SiO2)，其 RTN 相对不受影响。测得的 RTN 均方根（rms）幅值是数波动模型（NFM）预测值的六倍。这一结果表明，在多晶矽沟道电荷捕获存储器件中，载流子散射率的波动很可能是由晶界处陷阱的运动和/或重新配置引起的，从而导致了很大一部分低频噪声和/或 RTN。这些波动的幅度可能会给高比例三维存储器件的分辨率带来重大挑战。

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来源期刊

Accounts of Chemical Research 化学-化学综合

CiteScore

31.40

自引率

1.10%

发文量

312

审稿时长

2 months

期刊介绍： Accounts of Chemical Research presents short, concise and critical articles offering easy-to-read overviews of basic research and applications in all areas of chemistry and biochemistry. These short reviews focus on research from the author’s own laboratory and are designed to teach the reader about a research project. In addition, Accounts of Chemical Research publishes commentaries that give an informed opinion on a current research problem. Special Issues online are devoted to a single topic of unusual activity and significance. Accounts of Chemical Research replaces the traditional article abstract with an article "Conspectus." These entries synopsize the research affording the reader a closer look at the content and significance of an article. Through this provision of a more detailed description of the article contents, the Conspectus enhances the article's discoverability by search engines and the exposure for the research.