Design and Development of a 224-pixel TES X-Ray Microcalorimeter System for Microanalysis with STEM

IF 1.1 3区 物理与天体物理 Q4 PHYSICS, APPLIED
Tasuku Hayashi, Rikuta Miyagawa, Yuta Yagi, Keita Tanaka, Ryo Ota, Noriko Y. Yamasaki, Kazuhisa Mitsuda, Keisuke Maehata, Toru Hara
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Abstract

Studies of astromaterials provide valuable insights into the formation and evolution of the solar system. To analyze such astromaterials on a sub-micrometer scale, one of the most useful tools is energy-dispersive X-ray spectroscopy (EDS) in conjunction with scanning transmission electron microscope (STEM). The conventional semiconductor-based EDS system is sometimes insufficient to resolve emission lines at closely adjacent energies. A transition edge sensor (TES) X-ray microcalorimeter is a promising solution to overcome this problem. We developed a 64-pixel TES X-ray microcalorimeter array which had an energy resolution of approximately 7 eV (FWHM) at an energy band from B Kα to Cu Kα. However, the counting rate was only approximately 1000 count/s/array. The distance between the detector and the sample is 30 cm, limited by the stage of the refrigerator. Therefore, an X-ray polycapillary is used to focus the X-ray, which focus size is 5 mm in diameter, resulting in a detection efficiency of only 5%. To increase the effective area, we developed a large size absorber with a large-scale array. A three-dimensional structure was created to fill the dead space between TES pixels. Additionally, an array of 224 elements was made to increase the detection efficiency by a factor of 10. In this paper, we provide more details of design, fabrication process of the overhang absorber, and device performance.

Abstract Image

设计和开发用于 STEM 显微分析的 224 像素 TES X 射线微量热仪系统
天体材料研究为了解太阳系的形成和演化提供了宝贵的资料。要在亚微米尺度上分析这类天体材料,最有用的工具之一是结合扫描透射电子显微镜(STEM)的能量色散 X 射线光谱仪(EDS)。传统的基于半导体的 EDS 系统有时不足以分辨能量相近的发射线。过渡边缘传感器(TES)X 射线微量热仪是克服这一问题的一个很有前途的解决方案。我们开发了一个 64 像素 TES X 射线微量热仪阵列,在从 B Kα 到 Cu Kα 的能带上具有约 7 eV (FWHM) 的能量分辨率。然而,计数率仅为大约 1000 次/秒/阵列。探测器和样品之间的距离为 30 厘米,这受到冰箱舞台的限制。因此,我们使用了 X 射线聚毛细管来聚焦 X 射线,其聚焦尺寸为直径 5 毫米,导致探测效率仅为 5%。为了增加有效面积,我们开发了一种具有大型阵列的大尺寸吸收器。我们创建了一个三维结构来填补 TES 像素之间的死角。此外,我们还制作了一个由 224 个元件组成的阵列,将检测效率提高了 10 倍。本文将详细介绍悬挂式吸收器的设计、制造工艺和器件性能。
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来源期刊
Journal of Low Temperature Physics
Journal of Low Temperature Physics 物理-物理:凝聚态物理
CiteScore
3.30
自引率
25.00%
发文量
245
审稿时长
1 months
期刊介绍: The Journal of Low Temperature Physics publishes original papers and review articles on all areas of low temperature physics and cryogenics, including theoretical and experimental contributions. Subject areas include: Quantum solids, liquids and gases; Superfluidity; Superconductivity; Condensed matter physics; Experimental techniques; The Journal encourages the submission of Rapid Communications and Special Issues.
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