Effects of impedance matching network on α–γ mode transition in atmospheric pressure RF discharges

Abstract

In atmospheric pressure radio-frequency discharges, positive and negative feedback regions are defined based on the influence of varying the capacitance of the series capacitor in an inverted L-type impedance matching network on the fed RF power at the input port of the impedance matching network. The impact of the impedance matching network on the α-γ mode transition was investigated by adjusting the tuning series capacitor in the impedance matching network. The critical RF power as well as current and voltage at the α-γ mode transition is almost independent off the impedance matching network, while the counterpart immediately after the α-γ mode transition varies remarkably. The underlying mechanism is understood in terms of different feedbacks. Positive and negative feedbacks respectively promote and suppress the increment in RF power during the α-γ mode transition.