Silicon-based microscale-oscillating heat pipes for high power and high heat flux operation

IF 3.5 2区物理与天体物理 Q2 PHYSICS, APPLIED

Applied Physics Letters Pub Date : 2024-07-10 DOI:10.1063/5.0216530

Qian Qian, Xin Zhang, Shurong Tian, Bojing Yao, Justin A. Weibel, Liang Pan

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引用次数: 0

Abstract

Microscale-oscillating heat pipes (micro-OHPs) have recently drawn interest for electronic cooling applications due to their compact size and passive operating mechanism. The occurrence of dryout in OHPs, however, at which the working liquid no longer wets the evaporator, limits the maximum operating cooling power, preventing their integration for direct cooling of high heat flux semiconductor chips. Here, we report on high power and high flux operation of silicon-based OHPs by using microchannels with hydraulic diameters of ∼200 μm. Particularly, a micro-OHP with 100 μm channel height is shown to effectively operate at 210 W using a dielectric working fluid, corresponding to an unprecedented cooling power density of 145 W/cm2, without dryout. A distinctive oscillating mode with highly periodic bulk circulations occurs at high heating power and can provide efficient heat dissipation. The flow speed of the liquid under this bulk circulation mode can be as high as 10 m/s. The empirical relationships between the heat transfer rate, oscillating frequency, and device temperatures are studied.

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用于高功率和高热流量运行的硅基微米级振荡热管

微尺度振荡热管（micro-OHPs）因其紧凑的尺寸和被动的工作机制，最近在电子冷却应用中引起了人们的兴趣。然而，当工作液体不再润湿蒸发器时，OHP 中会出现干涸现象，从而限制了最大工作冷却功率，使其无法集成到高热通量半导体芯片的直接冷却中。在此，我们报告了利用液压直径为 ∼200 μm 的微通道实现硅基 OHP 高功率和高通量运行的情况。特别是，使用介电工作流体，100 μm 沟道高度的微型 OHP 可以在 210 W 的功率下有效运行，冷却功率密度达到前所未有的 145 W/cm2，且不会出现干涸现象。在高加热功率下，会出现一种独特的振荡模式，这种模式具有高度周期性的大量循环，可以提供高效的散热。在这种大体积循环模式下，液体的流速可高达 10 米/秒。研究了传热速率、振荡频率和设备温度之间的经验关系。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Applied Physics Letters 物理-物理：应用

CiteScore

6.40

自引率

10.00%

发文量

1821

审稿时长

1.6 months

期刊介绍： Applied Physics Letters (APL) features concise, up-to-date reports on significant new findings in applied physics. Emphasizing rapid dissemination of key data and new physical insights, APL offers prompt publication of new experimental and theoretical papers reporting applications of physics phenomena to all branches of science, engineering, and modern technology. In addition to regular articles, the journal also publishes invited Fast Track, Perspectives, and in-depth Editorials which report on cutting-edge areas in applied physics. APL Perspectives are forward-looking invited letters which highlight recent developments or discoveries. Emphasis is placed on very recent developments, potentially disruptive technologies, open questions and possible solutions. They also include a mini-roadmap detailing where the community should direct efforts in order for the phenomena to be viable for application and the challenges associated with meeting that performance threshold. Perspectives are characterized by personal viewpoints and opinions of recognized experts in the field. Fast Track articles are invited original research articles that report results that are particularly novel and important or provide a significant advancement in an emerging field. Because of the urgency and scientific importance of the work, the peer review process is accelerated. If, during the review process, it becomes apparent that the paper does not meet the Fast Track criterion, it is returned to a normal track.