Vertical field-effect transistor using c-axis aligned crystal indium–gallium–zinc oxide on glass substrate and prototype organic light-emitting diode display

IF 1.7 4区工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC

Journal of the Society for Information Display Pub Date : 2024-06-21 DOI:10.1002/jsid.1334

Masataka Nakada, Yukinori Shima, Masami Jincho, Manabu Sato, Daisuke Kurosaki, Junichi Koezuka, Kenichi Okazaki, Motoharu Saito, Koji Kusunoki, Tomoaki Atsumi, Norihiko Seo, Shunpei Yamazaki

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引用次数: 0

Abstract

This study developed a technology for a vertical field-effect transistor (VFET) incorporating c-axis aligned crystal oxide semiconductor on a Gen 3.5 glass substrate. VFETs, with a channel length of 0.5 μm, demonstrated stable characteristics with minimal variation, higher on-state current compared with low-temperature polysilicon FETs, and extremely low off-state leakage current. A prototype 513-ppi organic light-emitting diode display that features a red, green, and blue stripe arrangement and includes an internal compensation circuit with a configuration of six transistors and two capacitors was fabricated by harnessing the advantageous features of VFETs. Such a display was previously unattainable with planar FETs. Thus, the developed VFET technology presents a viable pathway for achieving ultrahigh-resolution panels on glass substrates.

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在玻璃衬底上使用 c 轴对齐晶体铟镓锌氧化物的垂直场效应晶体管和有机发光二极管显示器原型

这项研究开发了一种垂直场效应晶体管（VFET）技术，在 3.5 代玻璃衬底上采用了 c 轴排列的晶体氧化物半导体。沟道长度为 0.5 μm 的垂直场效应晶体管具有稳定的特性，变化极小，与低温多晶硅场效应晶体管相比，具有更高的导通电流和极低的离态漏电流。通过利用 VFET 的优势特性，我们制造出了一个 513ppi 有机发光二极管显示屏原型，它具有红、绿、蓝三色条纹排列，并包含一个由六个晶体管和两个电容器组成的内部补偿电路。这种显示屏是平面场效应晶体管以前无法实现的。因此，所开发的 VFET 技术为在玻璃基板上实现超高分辨率面板提供了一条可行的途径。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Journal of the Society for Information Display 工程技术-材料科学：综合

CiteScore

4.80

自引率

8.70%

发文量

审稿时长

3 months

期刊介绍： The Journal of the Society for Information Display publishes original works dealing with the theory and practice of information display. Coverage includes materials, devices and systems; the underlying chemistry, physics, physiology and psychology; measurement techniques, manufacturing technologies; and all aspects of the interaction between equipment and its users. Review articles are also published in all of these areas. Occasional special issues or sections consist of collections of papers on specific topical areas or collections of full length papers based in part on oral or poster presentations given at SID sponsored conferences.