Modification of the Metallic Magnetic Calorimeter Fabrication Process for High Production Yield

IF 1.1 3区 物理与天体物理 Q4 PHYSICS, APPLIED
J. W. Song, S. G. Kim, H. S. Kim, H. J. Kim, M. K. Lee
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引用次数: 0

Abstract

We have modified the fabrication processes of metallic magnetic calorimeters (MMCs) to improve production yield. Key modifications include (i) the stress mitigation of the sputtered Nb film by optimizing the Argon deposition gas pressure, (ii) an optimized SiO\(_{\hbox {x}}\) insulator layer fabrication by switching from a lift-off to a wet-etching method and controlling the optimizing the temperature, (iii) the joint electroplating of thick gold structures for persistent current switch leads and a thermalization layer, and (iv) a reduced sputter-deposition time of the Ag:Er sensor material by introducing a new wafer holder. These modifications contribute to increased production yield, reduced fabrication time, and enhanced overall performance. Tests on MMCs fabricated with these modifications demonstrated uniformly improved critical current of the Nb meander coils, enhanced SiO\(_{\hbox {x}}\) insulation properties, strengthened persistent current switch systems, and reduced probability of Ag:Er oxidation. These modified MMC detectors also functioned well in tests for alpha spectrometry measurements, demonstrating good performance.

Abstract Image

改进金属磁性量热计制造工艺以提高产量
我们改进了金属磁性量热计(MMC)的制造工艺,以提高产量。主要修改包括:(i) 通过优化氩气沉积气体压力来减轻溅射铌薄膜的应力;(ii) 通过从掀起法转为湿蚀刻法和控制优化温度来优化 SiO\(_{\hbox {x}}\)绝缘层的制造;(iii) 为持续电流开关引线和热化层联合电镀厚金结构;(iv) 通过引入新的晶圆支架来缩短 Ag:Er 传感器材料的溅射沉积时间。这些改进有助于提高产量、缩短制造时间和提高整体性能。对利用这些改进制造的 MMC 进行的测试表明,铌蜿蜒线圈的临界电流得到了均匀改善,SiO\(_{\hbox {x}}\)绝缘性能得到增强,持续电流开关系统得到加强,Ag:Er 氧化的概率降低。这些改进型 MMC 探测器在α光谱测量测试中也表现出良好的性能。
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来源期刊
Journal of Low Temperature Physics
Journal of Low Temperature Physics 物理-物理:凝聚态物理
CiteScore
3.30
自引率
25.00%
发文量
245
审稿时长
1 months
期刊介绍: The Journal of Low Temperature Physics publishes original papers and review articles on all areas of low temperature physics and cryogenics, including theoretical and experimental contributions. Subject areas include: Quantum solids, liquids and gases; Superfluidity; Superconductivity; Condensed matter physics; Experimental techniques; The Journal encourages the submission of Rapid Communications and Special Issues.
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