An Electrostatic Lens for Correcting the Ion Beam of a Magnetron Source

IF 0.4 4区工程技术 Q4 ENGINEERING, MULTIDISCIPLINARY

Instruments and Experimental Techniques Pub Date : 2024-07-08 DOI:10.1134/s0020441224700556

A. A. Terent’ev

引用次数: 0

Abstract

The schematic diagram and design of an electrostatic lens for correction and additional focusing of a beam coming out of a magnetron-type ion source are described. A drawing of such a lens is presented.

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用于校正磁控管源离子束的静电透镜

摘要介绍了一种静电透镜的原理图和设计，该透镜用于校正和额外聚焦从磁控式离子源射出的光束。文中还展示了这种透镜的图纸。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Instruments and Experimental Techniques 工程技术-工程：综合

CiteScore

1.20

自引率

33.30%

发文量

113

审稿时长

4-8 weeks

期刊介绍： Instruments and Experimental Techniques is an international peer reviewed journal that publishes reviews describing advanced methods for physical measurements and techniques and original articles that present techniques for physical measurements, principles of operation, design, methods of application, and analysis of the operation of physical instruments used in all fields of experimental physics and when conducting measurements using physical methods and instruments in astronomy, natural sciences, chemistry, biology, medicine, and ecology.

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