A low-cost method of fabricating Parylene-SU-8 micro-nanofluidic chip by thermal nanoimprint and multilayer compositing

IF 2.3 4区工程技术 Q2 INSTRUMENTS & INSTRUMENTATION

Microfluidics and Nanofluidics Pub Date : 2024-06-28 DOI:10.1007/s10404-024-02743-x

Lei Sun, Zhifu Yin, Ran Guo

引用次数: 0

Abstract

A new fabrication of micro-nano fluidic chips by thermal nanoimprint and multilayer compositing is proposed. The nano-channels with different aspect ratios were first manufactured by thermal nanoimprinting and Parylene layer coating, and the effect of parylene layer thickness on aspect ratio is studied. Then SU-8 layers with the micro channels and liquid reservoirs were superposed by ultraviolet exposure and secondary bonding to form a multilayer micro-nano fluidic chip. By optimizing the bonding parameters, a Parylene-SU-8 micro-nano fluidic chip with 200 μm wide and 8 μm deep micro-channels, cross-linked with 78 nm wide and 288 nm deep nano-channels was constructed, of which the maximum bonding strength is 0.92 MPa. This method has the advantages of simple process and low cost, which is suitable for mass manufacturing of micro-nano fluidic chips.

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利用热纳米压印和多层复合技术制造聚对二甲苯-SU-8 微纳流体芯片的低成本方法

本文提出了一种利用热纳米压印和多层复合技术制造微纳流体芯片的新方法。首先通过热纳米压印和聚对二甲苯层涂层制造出不同长径比的纳米通道，并研究了聚对二甲苯层厚度对长径比的影响。然后，通过紫外曝光和二次键合将带有微通道和储液器的 SU-8 层叠加在一起，形成多层微纳流体芯片。通过优化键合参数，构建了宽 200 μm、深 8 μm、交联有 78 nm 宽、288 nm 深纳米通道的对二甲苯-SU-8 微纳流体芯片，其最大键合强度为 0.92 MPa。该方法具有工艺简单、成本低廉等优点，适用于微纳流体芯片的大规模制造。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Microfluidics and Nanofluidics 工程技术-纳米科技

CiteScore

4.80

自引率

3.60%

发文量

审稿时长

2 months

期刊介绍： Microfluidics and Nanofluidics is an international peer-reviewed journal that aims to publish papers in all aspects of microfluidics, nanofluidics and lab-on-a-chip science and technology. The objectives of the journal are to (1) provide an overview of the current state of the research and development in microfluidics, nanofluidics and lab-on-a-chip devices, (2) improve the fundamental understanding of microfluidic and nanofluidic phenomena, and (3) discuss applications of microfluidics, nanofluidics and lab-on-a-chip devices. Topics covered in this journal include: 1.000 Fundamental principles of micro- and nanoscale phenomena like, flow, mass transport and reactions 3.000 Theoretical models and numerical simulation with experimental and/or analytical proof 4.000 Novel measurement & characterization technologies 5.000 Devices (actuators and sensors) 6.000 New unit-operations for dedicated microfluidic platforms 7.000 Lab-on-a-Chip applications 8.000 Microfabrication technologies and materials Please note, Microfluidics and Nanofluidics does not publish manuscripts studying pure microscale heat transfer since there are many journals that cover this field of research (Journal of Heat Transfer, Journal of Heat and Mass Transfer, Journal of Heat and Fluid Flow, etc.).