Silicon-Based Piezoresistive Stress Sensor Arrays for Use in Flexible Tactile Skin

Abstract

Bioinspired robotics and smart prostheses have many applications in the healthcare sector. Patients can use them for rehabilitation or day-to-day assistance, allowing them to regain some agency over their movements. The most common way to make these smart artificial limbs is by adding a “human-like” electronic skin to detect force and emulate touch detection. This paper presents a fully integrated CMOS-based stress sensor design with a high dynamic range (100 kPa to 100 MPa) supported by an adaptive gain-controlled chopping amplifier. The sensor chip includes four identical sensing structures capable of measuring the chip's local stress gradient and complete readout circuitry supporting data transfer via I2C protocol. The sensor takes 10.2 ms to measure through all four structures and goes into a low-power mode when not in use. The designed chip consumes a total current of $\sim$ 300 $\boldsymbol{\mu}$ A for one complete operation cycle and $\sim$ 30 $\boldsymbol{\mu}$ A during low power mode in simulations. Moreover, the complete design is CMOS-based, making it easier for large-scale commercial fabrication and more affordable for patients in the long run. This paper further proposes the concept of a tactile smart skin by integrating a network of sensor chips with flexible polymers.