A study on the high mobility and improved reliability of Pr-doped indium zinc oxide thin film transistors

IF 16.4 1区化学 Q1 CHEMISTRY, MULTIDISCIPLINARY

Accounts of Chemical Research Pub Date : 2024-06-05 DOI:10.1088/1361-6641/ad5465

Juncheng Xiao, Shimin Ge, Zhixiong Jiang, Jing Liu, Dong Yuan, Ce Liang, Miao Xu, Shan Li, Hongyuan Xu, Xianlai Wang, Shengdong Zhang

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引用次数: 0

Abstract

It is generally accepted that there is a trade-off relationship between mobility and stability for oxide thin film transistor (TFT) devices. Different doping ratios of Ln praseodymium (Pr) into indium (In) zinc (Zn) oxide have been employed as the active layer to get 1# and 2# amorphous oxide semiconductor (AOS) TFTs in this work. The 1#-based TFTs exhibited a high mobility of 49.84 cm2 V−1 s−1 due to the increased concentration of In. By further elevating the Pr doping ratio of the film, the 2#-based TFT obtained both a good mobility of 26.65 cm2 V−1 s−1, and a promising stability, showing a positive-bias temperature stress (PBTS) stability of ∆VTH = 1.56 V and a negative-bias temperature illumination stress (NBTIS) stability of ∆VTH = −1.47 V. It was revealed that the low energy charge transfer state of Pr in 2# film absorbs the visible light, leading to suppressed photo-induced carriers and thus a good illumination reliability of the 2#-based TFTs. In practice, the LCD panel based 2# ACT TFT shows a well stable performance even under 10000-nit illumination. The result indicates a promising strategy to accelerate the commercialization of AOS TFTs to large-panel display production.

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关于掺镨氧化铟锌薄膜晶体管的高迁移率和更高可靠性的研究

人们普遍认为，氧化物薄膜晶体管（TFT）器件的迁移率和稳定性之间存在权衡关系。在这项研究中，铟（In）锌（Zn）氧化物中掺入了不同掺杂比的镧镨(Pr)作为活性层，从而得到了1#和2#非晶氧化物半导体（AOS）TFT。由于 In 浓度的增加，基于 1# 的 TFT 显示出 49.84 cm2 V-1 s-1 的高迁移率。通过进一步提高薄膜的 Pr 掺杂比，基于 2# 的 TFT 不仅获得了 26.65 cm2 V-1 s-1 的良好迁移率，而且具有良好的稳定性，其正偏压温度应力（PBTS）稳定性为 ∆VTH = 1.研究表明，2# 薄膜中 Pr 的低能量电荷转移态吸收了可见光，从而抑制了光诱导载流子，因此基于 2# 的 TFT 具有良好的照明可靠性。在实际应用中，基于 2# ACT TFT 的液晶面板即使在 10000 尼特照明下也能显示出良好的稳定性能。这一结果表明，在大屏幕显示器生产中加速 AOS TFT 的商业化是一项大有可为的战略。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Accounts of Chemical Research 化学-化学综合

CiteScore

31.40

自引率

1.10%

发文量

312

审稿时长

2 months

期刊介绍： Accounts of Chemical Research presents short, concise and critical articles offering easy-to-read overviews of basic research and applications in all areas of chemistry and biochemistry. These short reviews focus on research from the author’s own laboratory and are designed to teach the reader about a research project. In addition, Accounts of Chemical Research publishes commentaries that give an informed opinion on a current research problem. Special Issues online are devoted to a single topic of unusual activity and significance. Accounts of Chemical Research replaces the traditional article abstract with an article "Conspectus." These entries synopsize the research affording the reader a closer look at the content and significance of an article. Through this provision of a more detailed description of the article contents, the Conspectus enhances the article's discoverability by search engines and the exposure for the research.