Nanoantenna integrated narrowband photodetector for infrared gas sensing

IF 8 1区化学 Q1 CHEMISTRY, ANALYTICAL

Sensors and Actuators B: Chemical Pub Date : 2024-06-03 DOI:10.1016/j.snb.2024.136065

Peng Chen , Yingying Mei , Hua-Yao Li, Jianyu Hou, Haiyong Chen, Rongyu Mao, Zhou Jian, Shikang Xu, Huan Liu

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Abstract

Nanoantenna based on surface plasma polariton (SPR) resonance effect has been integrated respectively with pyroelectric and thermopile infrared detectors. This on-chip integration has enabled narrowband infrared detector for miniaturization of Non-Dispersive Infrared (NDIR) gas sensors as well as multi-component gas sensing. Herein, we propose and construct nanoantenna integrated quantum dot photodetector to further overcome the limitations of thermal detectors such as relatively slow response and low detectivity. We focus on PbS colloidal quantum dots (CQDs) owing to their strong absorption toward near infrared light and convenient integration with silicon substrates. The PECVD grown SiO₂ and EBE grown Au nanodisks were subsequently deposited on PbS CQD layer to form a metal-insulator-semiconductor (MIS) architecture. Typically, the nanoantenna integrated photodetector exhibited a narrowband photoresponse at peak wavelength around 1300 nm, with a 24 % improvement in the responsivity compared to conventional devices. NDIR gas-sensing studies based on the nanoantenna integrated narrowband photodetector show that the selectivity for specific gases (CH₄ and NH₃ in this study) is obtained without the need for additional narrowband filters, and lower detection limits are also achieved because of the higher photoresponse at specific wavelength. Our proof-of-concept work demonstrates the advantages of nanoantenna integrated narrowband photodetector for infrared gas sensing.

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用于红外气体传感的纳米天线集成窄带光电探测器

基于表面等离子体极化子（SPR）共振效应的纳米天线已分别与热释电和热电堆红外探测器集成。这种片上集成实现了窄带红外探测器的微型化，可用于非色散红外（NDIR）气体传感器以及多组分气体传感。在此，我们提出并构建了纳米天线集成量子点光电探测器，以进一步克服热探测器的局限性，如相对较慢的响应速度和较低的检测率。由于 PbS 胶体量子点（CQDs）对近红外光有很强的吸收能力，且易于与硅衬底集成，因此我们重点研究了它。PECVD 生长的二氧化硅和 EBE 生长的金纳米盘随后沉积在 PbS CQD 层上，形成金属-绝缘体-半导体（MIS）结构。与传统器件相比，纳米天线集成光电探测器在峰值波长 1300 nm 左右表现出窄带光响应，响应率提高了 24%。基于纳米天线集成窄带光电探测器的近红外气体传感研究表明，无需额外的窄带滤波器就能获得对特定气体（本研究中为 CH4 和 NH3）的选择性，而且由于特定波长处的光响应较高，还能获得较低的检测限。我们的概念验证工作证明了纳米天线集成窄带光电探测器在红外气体传感方面的优势。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Sensors and Actuators B: Chemical 工程技术-电化学

CiteScore

14.60

自引率

11.90%

发文量

1776

审稿时长

3.2 months

期刊介绍： Sensors & Actuators, B: Chemical is an international journal focused on the research and development of chemical transducers. It covers chemical sensors and biosensors, chemical actuators, and analytical microsystems. The journal is interdisciplinary, aiming to publish original works showcasing substantial advancements beyond the current state of the art in these fields, with practical applicability to solving meaningful analytical problems. Review articles are accepted by invitation from an Editor of the journal.