Factors controlling the performance of film patterns of cured sol-gel-derived positive-type photosensitive oligomeric silsesquioxanes with random structure
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引用次数: 0
Abstract
We investigated the effect of heating rates during post-baking on the minimum resolution widths of film patterns prepared from positive-type photosensitive random-structure oligomeric silsesquioxanes (oligo-SQs) with only phenyl (Ph) or both Ph and methyl (Me) groups (Ph group content ≥50 mol%) as substituents. Previously, increasing the Me group content produced 20 μm minimum widths. This was attributed to flow, fusion, and wrinkling during post-baking at 60 °C/min, and partly attributed to enhanced silanol (Si-OH) group reactivity during early stages of post-baking. Here, film patterns for high-definition optical devices fabricated from oligo-SQs with only Ph groups, or with the highest Me group content, produced desired 10 μm widths when heated slowly at 6 °C/min or 3 °C/min, respectively. The decreased widths were attributed to reduced flowability because of enhanced Si-OH group reactivity during heating and the changes and bulkiness of the oligo-SQ molecular structure. The Si-OH reactivity may have been enhanced by the activation of molecular chain motions with increased Me group content and the lower weight-average molecular weight. Structural changes and substituent bulkiness may have also suppressed the chain motions.
期刊介绍:
The primary objective of the Journal of Sol-Gel Science and Technology (JSST), the official journal of the International Sol-Gel Society, is to provide an international forum for the dissemination of scientific, technological, and general knowledge about materials processed by chemical nanotechnologies known as the "sol-gel" process. The materials of interest include gels, gel-derived glasses, ceramics in form of nano- and micro-powders, bulk, fibres, thin films and coatings as well as more recent materials such as hybrid organic-inorganic materials and composites. Such materials exhibit a wide range of optical, electronic, magnetic, chemical, environmental, and biomedical properties and functionalities. Methods for producing sol-gel-derived materials and the industrial uses of these materials are also of great interest.