{"title":"Design and Optimization Methodology of Coplanar Waveguide Test Structures for Dielectric Characterization of Thin Films","authors":"Jinqun Ge, T. Xia, Guoan Wang","doi":"10.1007/s10836-020-05873-6","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":501485,"journal":{"name":"Journal of Electronic Testing","volume":" 14","pages":"183 - 188"},"PeriodicalIF":0.0000,"publicationDate":"2020-03-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Electronic Testing","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1007/s10836-020-05873-6","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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