Jianfeng Jiang, Lin Xu, Luojun Du, Lu Li, Guangyu Zhang, Chenguang Qiu, Lian-Mao Peng
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引用次数: 0
Abstract
The van der Waals systems could be used to overcome the issue of Fermi-level pinning in contacts of transistors based on two-dimensional semiconductors. However, the lack of advanced-node-lithography-compatible methods limits the use of such materials in wafer-scale integrated manufacturing. Here we report a yttrium-doping approach to convert semiconducting molybdenum disulfide (MoS2) into metallic MoS2. The approach, which is compatible with advanced-node wafer-scale integration, improves the band alignment and provides ohmic device contacts. It is based on a solid-state-source three-step doping method involving plasma, deposition and annealing, and can provide ångström-thickness surface doping. The yttrium-doped MoS2 acts as a metallic buffer that improves charge carrier transfer from the metal electrode to semiconducting MoS2. With this approach, we fabricate self-aligned, 10-nm-channel-length MoS2 field-effect transistors on two-inch wafers with an average contact resistances of 69 Ω µm and total resistances of 235 Ω µm. Our devices exhibit an ON-current density of 1.22 mA µm–1 at a drain voltage of 0.7 V, a ballistic ratio of 79% and a transconductance of 3.2 mS µm–1. A yttrium-doped metallic two-dimensional buffer layer can be used to improve charge carrier transport between the metal contacts and semiconductor channel in molybdenum-disulfide-based transistors.
期刊介绍:
Nature Electronics is a comprehensive journal that publishes both fundamental and applied research in the field of electronics. It encompasses a wide range of topics, including the study of new phenomena and devices, the design and construction of electronic circuits, and the practical applications of electronics. In addition, the journal explores the commercial and industrial aspects of electronics research.
The primary focus of Nature Electronics is on the development of technology and its potential impact on society. The journal incorporates the contributions of scientists, engineers, and industry professionals, offering a platform for their research findings. Moreover, Nature Electronics provides insightful commentary, thorough reviews, and analysis of the key issues that shape the field, as well as the technologies that are reshaping society.
Like all journals within the prestigious Nature brand, Nature Electronics upholds the highest standards of quality. It maintains a dedicated team of professional editors and follows a fair and rigorous peer-review process. The journal also ensures impeccable copy-editing and production, enabling swift publication. Additionally, Nature Electronics prides itself on its editorial independence, ensuring unbiased and impartial reporting.
In summary, Nature Electronics is a leading journal that publishes cutting-edge research in electronics. With its multidisciplinary approach and commitment to excellence, the journal serves as a valuable resource for scientists, engineers, and industry professionals seeking to stay at the forefront of advancements in the field.