Unleashing the Performance of Self-Rolled-Up 3D Inductors via Deterministic Electroplating on Cylindrical Surfaces (Adv. Mater. Technol. 10/2024)

Abstract

Electroplating

In article number 2400092, Xiuling Li and co-workers introduce a strain-induced self-rolled-up membrane (S-RuM) platform that presents a CMOS-compatible solution for extreme miniaturization and on-chip integration of passive components including inductors and capacitors. By employing post-rolling electroplating on both the walls and core of the curved surfaces of S-RuM inductor arrays, enhancements to the quality factor and inductance can be achieved without sacrificing footprint.