Tuning sensitivity of surface plasmon resonance gas sensor based on multilayer black phosphorous

Abstract

We investigated a gas sensor that makes use of the surface plasmon resonance (SPR) effect in a thick layer of gold (Au), copper (Cu), ZnO, and multilayer black phosphorous (BP). The suitability of the proposed gas sensor was investigated for a range of analyte gases recognized for their toxicity, greenhouse effect, or flammability. The proposed gas sensor obtains a maximum sensitivity of 258.77°/RIU with a remarkable full width at half maximum (FWHM) of 7.12°, detection accuracy (DA) of 0.14/°, and Figure of merit (FoM) of 36.22. The result of our enhanced numerical analysis indicates that the performance of a multilayer BP is enhanced when compared to a conventional gas sensor. As a result, using a SiO2 prism to sense different gases at a wavelength of 633[Formula: see text]nm, the suggested gas sensor may be more advantageous. Moreover, the maximum sensitivity of 374.31/RIU is obtained with a remarkable DA of 0.11° and FoM of 37.63/RIU to detect NO2 gas sensing to maintain the [Formula: see text]value. The gas sensor performance is high at different refractive indices for gas analyte (1–1.07). The performance of the proposed gas sensor is superior to that of the existing gas sensors.