The syntheses, characterization, thermal properties of asymmetrical La β-diketonate and their application as ALD precursor for La2O3 films

IF 16.4 1区化学 Q1 CHEMISTRY, MULTIDISCIPLINARY

Accounts of Chemical Research Pub Date : 2024-05-17 DOI:10.1007/s11243-024-00583-w

Wenyong Zhao, Hong Zhou, Jiahao Li, Yuchen Lu, Yuqiang Ding

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Abstract

In this paper, three complexes La₂(thd)₆ (thd = 2,2,6,6-tetramethyl-3,5-heptanedione, 1)_, La₂(tmod)₆ (tmod = 2,2,6,6-tetramethyl octane-3, 5-dionates, 2) and La₂(ibpm)₆ (ibpm = 2,2,6-trimethyl-3, 5-heptane-dionates, 3) were synthesized by one-step method and characterized with ¹H-NMR, ¹³C-NMR and X-ray single-crystal diffraction. The melting point and TGA data demonstrated that the asymmetry of the ligand and the number of flexible joints could improve the volatility of the complex. With the help of asymmetry and flexible joint, La₂(tmod)₆ was selected as ALD precursor to deposit La₂O₃ film on SiO₂/Si (100) wafer. The self-limited deposition results demonstrated that La₂(tmod)₆ is better precursor than reported La₂(thd)₆ and La(thd)₃-DMEA (DMEA = N,N-dimethylethylenediamine).

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不对称 La β-二酮酸酯的合成、表征、热性能及其在 La2O3 薄膜 ALD 前体中的应用

本文采用一步法合成了三种配合物 La2(thd)6（thd = 2,2,6,6-四甲基-3,5-庚二酮，1）、La2(tmod)6（tmod = 2,2,6,6-四甲基辛烷-3,5-二酮酸盐，2）和 La2(ibpm)6（ibpm = 2,2,6-三甲基-3,5-庚二酮酸盐，3）、2）和 La2(ibpm)6（ibpm = 2,2,6-三甲基-3,5-庚烷二酮酸盐，3），并用 1H-NMR、13C-NMR 和 X 射线单晶衍射进行了表征。熔点和热重数据表明，配体的不对称性和柔性连接的数量可以提高配合物的挥发性。利用配体的不对称性和柔性接头，选择 La2(tmod)6 作为 ALD 前驱体，在二氧化硅/硅（100）晶片上沉积 La2O3 薄膜。自限沉积结果表明，与已报道的 La2(thd)6 和 La(thd)3-DMEA （DMEA = N,N-二甲基乙二胺）相比，La2(tmod)6 是更好的前驱体。

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来源期刊

Accounts of Chemical Research 化学-化学综合

CiteScore

31.40

自引率

1.10%

发文量

312

审稿时长

2 months

期刊介绍： Accounts of Chemical Research presents short, concise and critical articles offering easy-to-read overviews of basic research and applications in all areas of chemistry and biochemistry. These short reviews focus on research from the author’s own laboratory and are designed to teach the reader about a research project. In addition, Accounts of Chemical Research publishes commentaries that give an informed opinion on a current research problem. Special Issues online are devoted to a single topic of unusual activity and significance. Accounts of Chemical Research replaces the traditional article abstract with an article "Conspectus." These entries synopsize the research affording the reader a closer look at the content and significance of an article. Through this provision of a more detailed description of the article contents, the Conspectus enhances the article's discoverability by search engines and the exposure for the research.