The syntheses, characterization, thermal properties of asymmetrical La β-diketonate and their application as ALD precursor for La2O3 films

IF 1.6 4区化学 Q3 CHEMISTRY, INORGANIC & NUCLEAR

Transition Metal Chemistry Pub Date : 2024-05-17 DOI:10.1007/s11243-024-00583-w

Wenyong Zhao, Hong Zhou, Jiahao Li, Yuchen Lu, Yuqiang Ding

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Abstract

In this paper, three complexes La₂(thd)₆ (thd = 2,2,6,6-tetramethyl-3,5-heptanedione, 1)_, La₂(tmod)₆ (tmod = 2,2,6,6-tetramethyl octane-3, 5-dionates, 2) and La₂(ibpm)₆ (ibpm = 2,2,6-trimethyl-3, 5-heptane-dionates, 3) were synthesized by one-step method and characterized with ¹H-NMR, ¹³C-NMR and X-ray single-crystal diffraction. The melting point and TGA data demonstrated that the asymmetry of the ligand and the number of flexible joints could improve the volatility of the complex. With the help of asymmetry and flexible joint, La₂(tmod)₆ was selected as ALD precursor to deposit La₂O₃ film on SiO₂/Si (100) wafer. The self-limited deposition results demonstrated that La₂(tmod)₆ is better precursor than reported La₂(thd)₆ and La(thd)₃-DMEA (DMEA = N,N-dimethylethylenediamine).

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不对称 La β-二酮酸酯的合成、表征、热性能及其在 La2O3 薄膜 ALD 前体中的应用

本文采用一步法合成了三种配合物 La2(thd)6（thd = 2,2,6,6-四甲基-3,5-庚二酮，1）、La2(tmod)6（tmod = 2,2,6,6-四甲基辛烷-3,5-二酮酸盐，2）和 La2(ibpm)6（ibpm = 2,2,6-三甲基-3,5-庚二酮酸盐，3）、2）和 La2(ibpm)6（ibpm = 2,2,6-三甲基-3,5-庚烷二酮酸盐，3），并用 1H-NMR、13C-NMR 和 X 射线单晶衍射进行了表征。熔点和热重数据表明，配体的不对称性和柔性连接的数量可以提高配合物的挥发性。利用配体的不对称性和柔性接头，选择 La2(tmod)6 作为 ALD 前驱体，在二氧化硅/硅（100）晶片上沉积 La2O3 薄膜。自限沉积结果表明，与已报道的 La2(thd)6 和 La(thd)3-DMEA （DMEA = N,N-二甲基乙二胺）相比，La2(tmod)6 是更好的前驱体。

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来源期刊

Transition Metal Chemistry 化学-无机化学与核化学

CiteScore

3.60

自引率

0.00%

发文量

审稿时长

1.3 months

期刊介绍： Transition Metal Chemistry is an international journal designed to deal with all aspects of the subject embodied in the title: the preparation of transition metal-based molecular compounds of all kinds (including complexes of the Group 12 elements), their structural, physical, kinetic, catalytic and biological properties, their use in chemical synthesis as well as their application in the widest context, their role in naturally occurring systems etc. Manuscripts submitted to the journal should be of broad appeal to the readership and for this reason, papers which are confined to more specialised studies such as the measurement of solution phase equilibria or thermal decomposition studies, or papers which include extensive material on f-block elements, or papers dealing with non-molecular materials, will not normally be considered for publication. Work describing new ligands or coordination geometries must provide sufficient evidence for the confident assignment of structural formulae; this will usually take the form of one or more X-ray crystal structures.