Electron-induced deposition using Fe(CO)4MA and Fe(CO)5 - effect of MA ligand and process conditions.

IF 2.6 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY
Beilstein Journal of Nanotechnology Pub Date : 2024-05-08 eCollection Date: 2024-01-01 DOI:10.3762/bjnano.15.45
Hannah Boeckers, Atul Chaudhary, Petra Martinović, Amy V Walker, Lisa McElwee-White, Petra Swiderek
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引用次数: 0

Abstract

The electron-induced decomposition of Fe(CO)4MA (MA = methyl acrylate), which is a potential new precursor for focused electron beam-induced deposition (FEBID), was investigated by surface science experiments under UHV conditions. Auger electron spectroscopy was used to monitor deposit formation. The comparison between Fe(CO)4MA and Fe(CO)5 revealed the effect of the modified ligand architecture on the deposit formation in electron irradiation experiments that mimic FEBID and cryo-FEBID processes. Electron-stimulated desorption and post-irradiation thermal desorption spectrometry were used to obtain insight into the fate of the ligands upon electron irradiation. As a key finding, the deposits obtained from Fe(CO)4MA and Fe(CO)5 were surprisingly similar, and the relative amount of carbon in deposits prepared from Fe(CO)4MA was considerably less than the amount of carbon in the MA ligand. This demonstrates that electron irradiation efficiently cleaves the neutral MA ligand from the precursor. In addition to deposit formation by electron irradiation, the thermal decomposition of Fe(CO)4MA and Fe(CO)5 on an Fe seed layer prepared by EBID was compared. While Fe(CO)5 sustains autocatalytic growth of the deposit, the MA ligand hinders the thermal decomposition in the case of Fe(CO)4MA. The heteroleptic precursor Fe(CO)4MA, thus, offers the possibility to suppress contributions of thermal reactions, which can compromise control over the deposit shape and size in FEBID processes.

使用 Fe(CO)4MA 和 Fe(CO)5 进行电子诱导沉积--MA 配体和工艺条件的影响。
在超高真空条件下,通过表面科学实验研究了Fe(CO)4MA(MA=丙烯酸甲酯)的电子诱导分解过程,Fe(CO)4MA是一种潜在的聚焦电子束诱导沉积(FEBID)新前驱体。欧杰电子能谱用于监测沉积物的形成。通过对 Fe(CO)4MA 和 Fe(CO)5 进行比较,发现在模拟 FEBID 和低温 FEBID 过程的电子辐照实验中,改性配体结构对沉积形成的影响。电子激发解吸和辐照后热解吸光谱法用于深入了解电子辐照时配体的去向。一个重要发现是,Fe(CO)4MA 和 Fe(CO)5 的沉积物惊人地相似,Fe(CO)4MA 制备的沉积物中碳的相对含量大大低于 MA 配体中的碳含量。这表明电子辐照能有效地从前驱体中裂解出中性的 MA 配体。除了通过电子辐照形成沉积物外,还比较了通过 EBID 制备的铁种子层上的 Fe(CO)4MA 和 Fe(CO)5 的热分解情况。Fe(CO)5能维持沉积物的自催化生长,而Fe(CO)4MA的MA配体则阻碍了热分解。因此,Fe(CO)4MA 这种异质前驱体提供了抑制热反应的可能性,而热反应会影响对 FEBID 过程中沉积物形状和尺寸的控制。
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来源期刊
Beilstein Journal of Nanotechnology
Beilstein Journal of Nanotechnology NANOSCIENCE & NANOTECHNOLOGY-MATERIALS SCIENCE, MULTIDISCIPLINARY
CiteScore
5.70
自引率
3.20%
发文量
109
审稿时长
2 months
期刊介绍: The Beilstein Journal of Nanotechnology is an international, peer-reviewed, Open Access journal. It provides a unique platform for rapid publication without any charges (free for author and reader) – Platinum Open Access. The content is freely accessible 365 days a year to any user worldwide. Articles are available online immediately upon publication and are publicly archived in all major repositories. In addition, it provides a platform for publishing thematic issues (theme-based collections of articles) on topical issues in nanoscience and nanotechnology. The journal is published and completely funded by the Beilstein-Institut, a non-profit foundation located in Frankfurt am Main, Germany. The editor-in-chief is Professor Thomas Schimmel – Karlsruhe Institute of Technology. He is supported by more than 20 associate editors who are responsible for a particular subject area within the scope of the journal.
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