Crack-free growth of UVC LEDs on 6-inch sapphire substrates using face-to-face high-temperature annealed AlN by production scale MOCVD

Junya Yoshinaga, Keitaro Ikejiri, Shuichi Koseki, K. Uesugi, Hideto Miyake
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通过量产规模的 MOCVD 技术,在 6 英寸蓝宝石衬底上使用面对面高温退火氮化铝无裂纹生长紫外线 LED
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