A Mechanically Coupled Piezoelectric MEMS Filter With Tiny Percent Bandwidth and Low Insertion Loss

IF 2.5 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Journal of Microelectromechanical Systems Pub Date : 2023-12-29 DOI:10.1109/JMEMS.2023.3345286

Kewen Zhu;Yuhao Xiao;Jinzhao Han;Guoqiang Wu

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引用次数: 0

Abstract

Mechanical filters implement channel selection in a tiny percent bandwidth and become essential components in wireless communication systems and sensor networks. This paper reports a mechanically coupled piezoelectric microelectromechanical system (MEMS) filter, which consists of two width-extensional (WE) mode resonators mechanically coupled by a straight beam. The coupling beam, located at the plate edges and purposely designed to operate in flexural mode with low dynamic stiffness, enables the filter to achieve a small percent bandwidth. The designed mechanically coupled piezoelectric MEMS filter is fabricated based on a thin-film piezoelectric on silicon (TPoS) platform. Measurement results indicate that under a termination impedance of

$550~\Omega $

, the fabricated piezoelectric MEMS filter has a center frequency of 28.38 MHz, a percent bandwidth of 0.049%, an insertion loss of 2.0 dB, and a stopband rejection of approximately 41 dB outside the desired frequency range. [2023-0141]

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具有微小百分比带宽和低插入损耗的机械耦合压电 MEMS 滤波器

机械滤波器可在极小的百分比带宽内实现信道选择，已成为无线通信系统和传感器网络的重要组件。本文介绍了一种机械耦合压电微机电系统（MEMS）滤波器，它由两个通过直梁机械耦合的宽度扩展（WE）模式谐振器组成。耦合梁位于板边缘，特意设计为以低动态刚度的挠曲模式工作，使滤波器能够实现较小的带宽百分比。所设计的机械耦合压电 MEMS 滤波器是基于硅薄膜压电（TPoS）平台制造的。测量结果表明，在 550~\Omega $ 的终端阻抗下，所制造的压电 MEMS 滤波器的中心频率为 28.38 MHz，百分比带宽为 0.049%，插入损耗为 2.0 dB，在所需频率范围外的阻带抑制约为 41 dB。[2023-0141]

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Journal of Microelectromechanical Systems 工程技术-工程：电子与电气

CiteScore

6.20

自引率

7.40%

发文量

115

审稿时长

7.5 months

期刊介绍： The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.