Quantifying the performances of SU-8 microfluidic devices: high liquid water tightness, long-term stability, and vacuum compatibility

IF 2.3 4区 工程技术 Q2 INSTRUMENTS & INSTRUMENTATION
Said Pashayev, Romain Lhermerout, Christophe Roblin, Eric Alibert, Jerome Barbat, Rudy Desgarceaux, Remi Jelinek, Edouard Chauveau, Saïd Tahir, Vincent Jourdain, Rasim Jabbarov, Francois Henn, Adrien Noury
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Abstract

Despite several decades of development, microfluidics lacks a sealing material that can be readily fabricated, leak-tight under high liquid water pressure, stable over a long time, and vacuum compatible. In this paper, we report the performances of a micro-scale processable sealing material for nanofluidic/microfluidics chip fabrication, which enables us to achieve all these requirements. We observed that micrometric walls made of SU-8 photoresist, whose thickness range from 35 to 135 µm, are at least leak-tight to 1.5 bars and up to 5.5 bars, exhibit no water porosity even after 2 months of aging, and are able to sustain under \(10^{-5}\) mbar vacuum. This sealing material is therefore reliable and versatile for building microchips, part of which must be isolated from liquid water under pressure or vacuum. Moreover, the fabrication process we propose does not require the use of either aggressive chemicals or high-temperature or high-energy plasma treatment. It thus opens a new perspective to seal microchips with sensitive surfaces containing nanomaterials.

Abstract Image

量化 SU-8 微流体设备的性能:高液体水密性、长期稳定性和真空兼容性
尽管经过几十年的发展,微流控技术仍然缺乏一种易于制造、在高液态水压力下不泄漏、长期稳定和真空兼容的密封材料。在本文中,我们报告了一种用于纳米流体/微流体芯片制造的微尺度可加工密封材料的性能,它使我们能够实现所有这些要求。我们观察到,厚度在 35 到 135 µm 之间的 SU-8 光刻胶制成的微米壁至少在 1.5 巴到 5.5 巴的范围内具有密封性,即使经过 2 个月的老化也不会出现水孔,并且能够在 \(10^{-5}) mbar 真空下持续工作。因此,这种密封材料是制造微芯片的可靠多功能材料,其中的一部分必须在压力或真空条件下与液态水隔离。此外,我们提出的制造工艺既不需要使用腐蚀性化学品,也不需要进行高温或高能等离子处理。因此,它为密封含有纳米材料的敏感表面的微型芯片开辟了新的前景。
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来源期刊
Microfluidics and Nanofluidics
Microfluidics and Nanofluidics 工程技术-纳米科技
CiteScore
4.80
自引率
3.60%
发文量
97
审稿时长
2 months
期刊介绍: Microfluidics and Nanofluidics is an international peer-reviewed journal that aims to publish papers in all aspects of microfluidics, nanofluidics and lab-on-a-chip science and technology. The objectives of the journal are to (1) provide an overview of the current state of the research and development in microfluidics, nanofluidics and lab-on-a-chip devices, (2) improve the fundamental understanding of microfluidic and nanofluidic phenomena, and (3) discuss applications of microfluidics, nanofluidics and lab-on-a-chip devices. Topics covered in this journal include: 1.000 Fundamental principles of micro- and nanoscale phenomena like, flow, mass transport and reactions 3.000 Theoretical models and numerical simulation with experimental and/or analytical proof 4.000 Novel measurement & characterization technologies 5.000 Devices (actuators and sensors) 6.000 New unit-operations for dedicated microfluidic platforms 7.000 Lab-on-a-Chip applications 8.000 Microfabrication technologies and materials Please note, Microfluidics and Nanofluidics does not publish manuscripts studying pure microscale heat transfer since there are many journals that cover this field of research (Journal of Heat Transfer, Journal of Heat and Mass Transfer, Journal of Heat and Fluid Flow, etc.).
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