Said Pashayev, Romain Lhermerout, Christophe Roblin, Eric Alibert, Jerome Barbat, Rudy Desgarceaux, Remi Jelinek, Edouard Chauveau, Saïd Tahir, Vincent Jourdain, Rasim Jabbarov, Francois Henn, Adrien Noury
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引用次数: 0
Abstract
Despite several decades of development, microfluidics lacks a sealing material that can be readily fabricated, leak-tight under high liquid water pressure, stable over a long time, and vacuum compatible. In this paper, we report the performances of a micro-scale processable sealing material for nanofluidic/microfluidics chip fabrication, which enables us to achieve all these requirements. We observed that micrometric walls made of SU-8 photoresist, whose thickness range from 35 to 135 µm, are at least leak-tight to 1.5 bars and up to 5.5 bars, exhibit no water porosity even after 2 months of aging, and are able to sustain under \(10^{-5}\) mbar vacuum. This sealing material is therefore reliable and versatile for building microchips, part of which must be isolated from liquid water under pressure or vacuum. Moreover, the fabrication process we propose does not require the use of either aggressive chemicals or high-temperature or high-energy plasma treatment. It thus opens a new perspective to seal microchips with sensitive surfaces containing nanomaterials.
期刊介绍:
Microfluidics and Nanofluidics is an international peer-reviewed journal that aims to publish papers in all aspects of microfluidics, nanofluidics and lab-on-a-chip science and technology. The objectives of the journal are to (1) provide an overview of the current state of the research and development in microfluidics, nanofluidics and lab-on-a-chip devices, (2) improve the fundamental understanding of microfluidic and nanofluidic phenomena, and (3) discuss applications of microfluidics, nanofluidics and lab-on-a-chip devices. Topics covered in this journal include:
1.000 Fundamental principles of micro- and nanoscale phenomena like,
flow, mass transport and reactions
3.000 Theoretical models and numerical simulation with experimental and/or analytical proof
4.000 Novel measurement & characterization technologies
5.000 Devices (actuators and sensors)
6.000 New unit-operations for dedicated microfluidic platforms
7.000 Lab-on-a-Chip applications
8.000 Microfabrication technologies and materials
Please note, Microfluidics and Nanofluidics does not publish manuscripts studying pure microscale heat transfer since there are many journals that cover this field of research (Journal of Heat Transfer, Journal of Heat and Mass Transfer, Journal of Heat and Fluid Flow, etc.).